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    Device Fabrication and Probing of Discrete Carbon Nanostructures

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    Batra_Nitin_Thesis_Final.pdf
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    Type
    Thesis
    Authors
    Batra, Nitin M cc
    Advisors
    Da Costa, Pedro M. F. J. cc
    Committee members
    Di Fabrizio, Enzo M. cc
    Bakr, Osman cc
    Program
    Material Science and Engineering
    KAUST Department
    Physical Science and Engineering (PSE) Division
    Date
    2015-05-06
    Permanent link to this record
    http://hdl.handle.net/10754/552679
    
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    Abstract
    Device fabrication on multi walled carbon nanotubes (MWCNTs) using electrical beam lithography (EBL), electron beam induced deposition (EBID), ion beam induced deposition (IBID) methods was carried out, followed by device electrical characterization using a conventional probe station. A four-probe configuration was utilized to measure accurately the electrical resistivity of MWCNTs with similar results obtained from devices fabricated by different methods. In order to reduce the contact resistance of the beam deposited platinum electrodes, single step vacuum thermal annealing was performed. Microscopy and spectroscopy were carried out on the beam deposited electrodes to follow the structural and chemical changes occurring during the vacuum thermal annealing. For the first time, a core-shell type structure was identified on EBID Pt and IBID Pt annealed electrodes and analogous free standing nanorods previously exposed to high temperature. We believe this observation has important implications for transport properties studies of carbon materials. Apart from that, contamination of carbon nanostructure, originating from the device fabrication methods, was also studied. Finally, based on the observations of faster processing time together with higher yield and flexibility for device preparation, we investigated EBID to fabricate devices for other discrete carbon nanostructures.
    Citation
    Batra, N. M. (2015). Device Fabrication and Probing of Discrete Carbon Nanostructures. KAUST Research Repository. https://doi.org/10.25781/KAUST-09447
    DOI
    10.25781/KAUST-09447
    ae974a485f413a2113503eed53cd6c53
    10.25781/KAUST-09447
    Scopus Count
    Collections
    MS Theses; Physical Science and Engineering (PSE) Division; Material Science and Engineering Program

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