Characterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuators
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
MetadataShow full item record
AbstractThis paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs were tested using a probe station connected to a National Instruments (NI) controller that uses LabVIEW to extract the displacement results via image processing. The displacement results were then used to validate the thermal-electric-structural simulations produced by COMSOL. These results, in turn, were used to extract the stiffness for both actuator types. The data extracted show that chevron actuators can have larger stiffness values with increasing offsets, but at the cost of lower amplification factors. In contrast, kink actuators showed a constant stiffness value equivalent to the chevron actuator with the highest amplification factor. The kink actuator also had larger amplification factors than chevrons at all designs tested. Therefore, kink actuators are capable of longer throws at lower power levels than the standard chevron designs.
CitationRawashdeh E, Karam A, Foulds IG (2012) Characterization of Kink Actuators as Compared to Traditional Chevron Shaped Bent-Beam Electrothermal Actuators. Micromachines 3: 542-549. doi:10.3390/mi3030542.
The following license files are associated with this item:
Except where otherwise noted, this item's license is described as This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Showing items related by title, author, creator and subject.
Enhanced actuation in functionalized carbon nanotube–Nafion compositesLian, Huiqin; Qian, Weizhong; Estevez, Luis; Liu, Hailan; Liu, Yuexian; Jiang, Tao; Wang, Kuisheng; Guo, Wenli; Giannelis, Emmanuel P. (Elsevier BV, 2011-08)The fabrication and electromechanical performance of functionalized carbon nanotube (FCNT)-Nafion composite actuators were studied. The CNTs were modified successfully with polyethylene glycol (PEG), as verified by thermogravimetric analysis (TGA) and Fourier transform infrared (FT-IR) spectroscopy. Scanning electron microscopy (SEM) images show that the FCNTs are homogeneously dispersed in the Nafion matrix. The properties of FCNT-Nafion composites in terms of water uptake, ion exchange capacity, proton conductivity, dynamic mechanical properties, and actuation behavior were evaluated. The results show that the sample with 0.5 wt% FCNT exhibits the best overall behavior. Its storage modulus is 2.4 times higher than that of Nafion. In addition, the maximum generated strain and the blocking force for the same sample are 2 and 2.4 times higher compared to the neat Nafion actuator, respectively. © 2011 Elsevier B.V.
Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and ExperimentSaghir, Shahid; Bellaredj, Mohammed Lamine Faycal; Younis, Mohammad I. (ASME International, 2016-12-05)Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
Energy Efficient Wireless Vehicular-Guided Actuator NetworkBoudellioua, Imene; Shihada, Basem (IEEE, 2013-06-09)In this paper, we present an energy-efficient vehicular guided system for environmental disaster management using wireless sensor/actuator networks. Sensor nodes within clusters are controlled by a master node that is dynamically selected. Actuators support mobility for every sensor node in the area of interest. The system maintains energy efficiency using statistical, correlation, and confidence for determining actuator actions and implements an adaptive energy scheme to prolong the system lifespan. Experimental results show that the system is capable of saving up to 2.7Watt for every 28KByte of data exchanged. We also show that actuator actions are correct with a 90% confidence.