Nanaiah, Karumbaiah Chappanda; Batra, Nitin M; Holguin Lerma, Jorge Alberto; Da Costa, Pedro M. F. J.; Younis, Mohammad I.(IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers (IEEE), 2017-08-21)[Article]
Carbon nanotubes (CNTs) are one of the most actively researched structural materials due to their interesting electrical, mechanical, and chemical properties. Unlike single walled carbon nanotubes (SWCNTs), little work has been focused on multi-walled carbon nanotubes (MWCNTs) and their potential for practical devices. Here, we have fabricated bridge-shape devices integrating MWCNTs (> 50 nm in outer diameter) using three processes: optical lithography, electron beam-induced platinum deposition, and surface micromachining. Each device consists of a doubly-clamped nanotube suspended over gold electrodes on a highly conductive Si substrate. The suspended nanotubes are characterized individually using Raman spectroscopy and semiconductor parameters analysis and, overall, show, high crystallinity and low electrical resistance. The spring constants of doubly-clamped nanotubes were characterized using atomic force microscopy force-displacement measurements, with values as high as 70 N/m observed. Highly stiff MWCNTs are promising for a variety of applications, such as resonators and electrical interconnects. Through simulations, we estimate the resonance frequencies and pull-in voltages of these suspended nano-structures. The dependence of key parameters, such as the nanotube's length, Young's modulus, axial stress, and wall thickness is also discussed.
Sapsanis, Christos; Buttner, Ulrich; Omran, Hesham; Belmabkhout, Youssef; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N.(2016 IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), Institute of Electrical and Electronics Engineers (IEEE), 2017-03-07)[Conference Paper]
This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.
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