Sapsanis, Christos; Buttner, Ulrich; Omran, Hesham; Belmabkhout, Youssef; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N.(2016 IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), Institute of Electrical and Electronics Engineers (IEEE), 2017-03-07)[Conference Paper]
This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.
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