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dc.contributor.advisorYounis, Mohammad I.
dc.contributor.authorJaber, Nizar
dc.date.accessioned2014-05-21T09:35:16Z
dc.date.available2014-05-21T09:35:16Z
dc.date.issued2014-05
dc.identifier.doi10.25781/KAUST-4L585
dc.identifier.urihttp://hdl.handle.net/10754/317259
dc.description.abstractIn this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.
dc.language.isoen
dc.subjectMEMS
dc.subjectMicroContilever
dc.subjectElectrostatic
dc.subjectResonators
dc.subjectModes
dc.titleHigher Order Modes Excitation of Micro Cantilever Beams
dc.typeThesis
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Division
thesis.degree.grantorKing Abdullah University of Science and Technology
dc.contributor.committeememberClaudel, Christian G.
dc.contributor.committeememberThoroddsen, Sigurdur T
thesis.degree.disciplineMechanical Engineering
thesis.degree.nameMaster of Science
refterms.dateFOA2015-05-31T00:00:00Z


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