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    Higher Order Modes Excitation of Micro Cantilever Beams

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    Jaber, Nizar Thesis .pdf
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    Description:
    Jaber, Nizar Thesis
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    Type
    Thesis
    Authors
    Jaber, Nizar
    Advisors
    Younis, Mohammad I. cc
    Committee members
    Claudel, Christian G. cc
    Thoroddsen, Sigurdur T cc
    Program
    Mechanical Engineering
    KAUST Department
    Physical Science and Engineering (PSE) Division
    Date
    2014-05
    Embargo End Date
    2015-05-31
    Permanent link to this record
    http://hdl.handle.net/10754/317259
    
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    Show full item record
    Access Restrictions
    At the time of archiving, the student author of this thesis opted to temporarily restrict access to it. The full text of this thesis became available to the public after the expiration of the embargo on 2015-05-31.
    Abstract
    In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.
    DOI
    10.25781/KAUST-4L585
    ae974a485f413a2113503eed53cd6c53
    10.25781/KAUST-4L585
    Scopus Count
    Collections
    Theses; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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