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    Flexible Thermoelectric Generators on Silicon Fabric

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    Name:
    Galo Torres Sevilla Thesis.pdf
    Size:
    4.575Mb
    Format:
    PDF
    Description:
    Final Thesis
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    Type
    Thesis
    Authors
    Sevilla, Galo T. cc
    Advisors
    Hussain, Muhammad Mustafa cc
    Committee members
    Kosel, Jürgen cc
    Manchon, Aurelien cc
    Program
    Electrical Engineering
    KAUST Department
    Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division
    Date
    2012-11
    Embargo End Date
    2013-11-17
    Permanent link to this record
    http://hdl.handle.net/10754/253713
    
    Metadata
    Show full item record
    Access Restrictions
    At the time of archiving, the student author of this thesis opted to temporarily restrict access to it. The full text of this thesis became available to the public after the expiration of the embargo on 2013-11-17.
    Abstract
    In this work, the development of a Thermoelectric Generator on Flexible Silicon Fabric is explored to extend silicon electronics for flexible platforms. Low cost, easily deployable plastic based flexible electronics are of great interest for smart textile, wearable electronics and many other exciting applications. However, low thermal budget processing and fundamentally limited electron mobility hinders its potential to be competitive with well established and highly developed silicon technology. The use of silicon in flexible electronics involve expensive and abrasive materials and processes. In this work, high performance flexible thermoelectric energy harvesters are demonstrated from low cost bulk silicon (100) wafers. The fabrication of the micro- harvesters was done using existing silicon processes on silicon (100) and then peeled them off from the original substrate leaving it for reuse. Peeled off silicon has 3.6% thickness of bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. The demonstrated generic batch processing shows a pragmatic way of peeling off a whole silicon circuitry after conventional fabrication on bulk silicon wafers for extremely deformable high performance integrated electronics. In summary, by using a novel, low cost process, this work has successfully integrated existing and highly developed fabrication techniques to introduce a flexible energy harvester for sustainable applications.
    Citation
    Sevilla, G. T. (2012). Flexible Thermoelectric Generators on Silicon Fabric. KAUST Research Repository. https://doi.org/10.25781/KAUST-Q15NY
    DOI
    10.25781/KAUST-Q15NY
    ae974a485f413a2113503eed53cd6c53
    10.25781/KAUST-Q15NY
    Scopus Count
    Collections
    MS Theses; Electrical and Computer Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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