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dc.contributor.authorElshurafa, Amro M.
dc.contributor.authorHo, P.H.
dc.contributor.authorOuda, Mahmoud H.
dc.contributor.authorRadwan, Ahmed Gomaa
dc.contributor.authorSalama, Khaled N.
dc.date.accessioned2012-10-01T14:21:34Z
dc.date.available2012-10-01T14:21:34Z
dc.date.issued2012-10-01
dc.identifier.citationHo PH, Elshurafa AM, Ouda MH, Radwan AG, Salama KN (2012) Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in. Micro & Nano Letters 7: 965-969. doi:10.1049/mnl.2012.0642.
dc.identifier.issn17500443
dc.identifier.doi10.1049/mnl.2012.0642
dc.identifier.urihttp://hdl.handle.net/10754/246444
dc.description.abstractThis Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in shape to the top plate. Thus, when the top plate is actuated, it moves towards the bottom plate and fills the void present within the bottom plate without touching it akin to how puzzle pieces are assembled. Further, a reasonable horizontal separation is maintained between both the plates to avoid shorting. The electrostatic forces come from the capacitance formed between the top plate and bottom plate, and from the capacitance formed between the top plate and the doped substrate. The variable capacitor was fabricated in the PolyMUMPS process and provided a TR of 4.1 at 6 V, and its resonant frequency was in excess of 40 GHz.
dc.language.isoen
dc.publisherInstitution of Engineering and Technology (IET)
dc.relation.urlhttp://link.aip.org/link/MNLIBX/v7/i9/p965/s1&Agg=doi
dc.rightsArchived with thanks to Micro & Nano Letters
dc.subjectRF mems
dc.subjectvariable capacitor
dc.subjectSelf Resonanance Frequency (SRF)
dc.titleLow-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentSensors Lab
dc.identifier.journalMicro & Nano Letters
dc.eprint.versionPost-print
dc.contributor.institutionASM Pacific Technology Hong Kong Limited, Kwai Chung, Hong Kong
dc.contributor.institutionCairo University, Engineering Mathematics, Giza 12613, Egypt
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personElshurafa, Amro M.
kaust.personSalama, Khaled N.
kaust.personOuda, Mahmoud H.
refterms.dateFOA2018-06-13T13:54:10Z
dc.date.published-online2012-10-01
dc.date.published-print2012-09-01


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