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    Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

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    MNL_Variable_archive_kaust.pdf
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    Type
    Article
    Authors
    Elshurafa, Amro M.
    Ho, P.H.
    Ouda, Mahmoud H.
    Radwan, Ahmed Gomaa
    Salama, Khaled N. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Sensors Lab
    Date
    2012-10-01
    Online Publication Date
    2012-10-01
    Print Publication Date
    2012-09-01
    Permanent link to this record
    http://hdl.handle.net/10754/246444
    
    Metadata
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    Abstract
    This Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in shape to the top plate. Thus, when the top plate is actuated, it moves towards the bottom plate and fills the void present within the bottom plate without touching it akin to how puzzle pieces are assembled. Further, a reasonable horizontal separation is maintained between both the plates to avoid shorting. The electrostatic forces come from the capacitance formed between the top plate and bottom plate, and from the capacitance formed between the top plate and the doped substrate. The variable capacitor was fabricated in the PolyMUMPS process and provided a TR of 4.1 at 6 V, and its resonant frequency was in excess of 40 GHz.
    Citation
    Ho PH, Elshurafa AM, Ouda MH, Radwan AG, Salama KN (2012) Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in. Micro & Nano Letters 7: 965-969. doi:10.1049/mnl.2012.0642.
    Publisher
    Institution of Engineering and Technology (IET)
    Journal
    Micro & Nano Letters
    DOI
    10.1049/mnl.2012.0642
    Additional Links
    http://link.aip.org/link/MNLIBX/v7/i9/p965/s1&Agg=doi
    ae974a485f413a2113503eed53cd6c53
    10.1049/mnl.2012.0642
    Scopus Count
    Collections
    Articles; Electrical and Computer Engineering Program; Sensors Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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