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dc.contributor.authorElshurafa, Amro M.
dc.contributor.authorEmira, Ahmed
dc.contributor.authorRadwan, Ahmed Gomaa
dc.contributor.authorSalama, Khaled N.
dc.date.accessioned2012-07-23T10:03:55Z
dc.date.available2012-07-23T10:03:55Z
dc.date.issued2011-12-05
dc.identifier.citationElshurafa AM, Radwan AG, Emira A, Salama KN (2012) RF MEMS Fractal Capacitors With High Self-Resonant Frequencies. Journal of Microelectromechanical Systems 21: 10-12. doi:10.1109/JMEMS.2011.2175367.
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/JMEMS.2011.2175367
dc.identifier.urihttp://hdl.handle.net/10754/235131
dc.description.abstractThis letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality factors higher than 4 throughout a band of 1-15 GHz and reaching as high as 28 were achieved. Additional benefits that are readily attainable from implementing fractal capacitors in MEMS are discussed, including suppressing residual stress warping, eliminating the need for etching holes, and reducing parasitics. The latter benefits were acquired without any fabrication intervention. © 2011 IEEE.
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6095305
dc.rightsArchived with thanks to Journal of Microelectromechanical Systems
dc.subjectMEMS
dc.subjectFractal
dc.subjectRF
dc.titleRF MEMS Fractal Capacitors With High Self-Resonant Frequencies
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.contributor.departmentSensors Lab
dc.identifier.journalJournal of Microelectromechanical Systems
dc.contributor.institutionCairo University, Giza 12613, Egypt
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personElshurafa, Amro M.
kaust.personSalama, Khaled N.
refterms.dateFOA2018-06-13T20:11:26Z
dc.date.published-online2011-12-05
dc.date.published-print2012-02


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