Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems
Committee MembersFoulds, Ian G.
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AbstractThis dissertation reports the fabrication and characterization of integrated micro sensors consisting of magnetostrictive 500 μm long cantilevers or bridges and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo and their magnetic properties are optimized by field annealing resulting in a coercivity of 2.4 Oe. An alternating current applied to the interrogation elements magnetizes the magnetostrictive structures, and their longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The significance of using magnetostrictive micro beams is the high resonant frequency of the longitudinal vibration compared to transverse vibration, which can be exploited to develop sensors of high sensitivity.