Advanced Nanofabrication Process Development for Self-Powered System-on-Chip
AuthorsRojas, Jhonathan Prieto
AdvisorsHussain, Muhammad Mustafa
Embargo End Date2014-12-31
Permanent link to this recordhttp://hdl.handle.net/10754/134734
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Access RestrictionsAt the time of archiving, the student author of this thesis opted to temporarily restrict access to it. The full text of this thesis became available to the public after the expiration of the embargo on 2014-12-31.
AbstractIn this work the development of a Self-Powered System-On-Chip is explored by examining two components of process development in different perspectives. On one side, an energy component is approached from a biochemical standpoint where a Microbial Fuel Cell (MFC) is built with standard microfabrication techniques, displaying a novel electrode based on Carbon Nanotubes (CNTs). The fabrication process involves the formation of a micrometric chamber that hosts an enhanced CNT-based anode. Preliminary results are promising, showing a high current density (113.6mA/m2) compared with other similar cells. Nevertheless many improvements can be done to the main design and further characterization of the anode will give a more complete understanding and bring the device closer to a practical implementation. On a second point of view, nano-patterning through silicon nitride spacer width control is developed, aimed at producing alternative sub-100nm device fabrication with the potential of further scaling thanks to nanowire based structures. These nanostructures are formed from a nano-pattern template, by using a bottom-up fabrication scheme. Uniformity and scalability of the process are demonstrated and its potential described. An estimated area of 0.120μm2 for a 6T-SRAM (Static Random Access Memory) bitcell (6 devices) can be achieved. In summary, by using a novel sustainable energy component and scalable nano-patterning for logic and computing module, this work has successfully collected the essential base knowledge and joined two different elements that synergistically will contribute for the future implementation of a Self-Powered System-on-Chip.
CitationRojas, J. P. (2010). Advanced Nanofabrication Process Development for Self-Powered System-on-Chip. KAUST Research Repository. https://doi.org/10.25781/KAUST-34MCI