An investigation of the mechanical behavior of initially curved microplates under electrostatic actuation

Handle URI:
http://hdl.handle.net/10754/627620
Title:
An investigation of the mechanical behavior of initially curved microplates under electrostatic actuation
Authors:
Saghir, Shahid ( 0000-0001-8045-0228 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
In this article, we investigate the mechanical behavior of initially curved microplates under electrostatic actuation. Microplates are essential components of many Micro-Electro-Mechanical System devices; however, they commonly undergo an initial curvature imperfection, due to the microfabrication process. Initial curvature imperfection significantly affects the mechanical behavior of microplates. In this work, we derive a dynamic analogue of the von Kármán governing equation for such plates. These equations are then used to develop a reduced order model based on the Galerkin procedure to simulate the static and dynamic behavior of the microplate. Two profiles of initial curvature commonly encountered in microfabricated structures are considered, where one assumes a variation in shape along one dimension of the plate only (cylindrical bending shape) while the other assumes a variation in shape along both dimensions of the plate. Their effects on both the static and dynamic responses of the microplates are examined and compared. We validate the reduced order model by comparing the calculated static behavior and the fundamental natural frequency with those computed by a finite element model over a range of the initial plate rise. The static behavior of the microplate is investigated when varying the DC voltage. Then, the dynamic behavior of the microplate is examined under the application of a harmonic AC voltage superimposed to a DC voltage.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program; 4700 King Abdullah University of Science and Technology (KAUST), Thuwal, 23955-6900, , Saudi Arabia
Citation:
Saghir S, Younis MI (2018) An investigation of the mechanical behavior of initially curved microplates under electrostatic actuation. Acta Mechanica. Available: http://dx.doi.org/10.1007/s00707-018-2141-3.
Publisher:
Springer Nature
Journal:
Acta Mechanica
Issue Date:
28-Mar-2018
DOI:
10.1007/s00707-018-2141-3
Type:
Article
ISSN:
0001-5970; 1619-6937
Sponsors:
This research was supported by the King Abdullah University of Science and Technology (KAUST) fund.
Additional Links:
http://link.springer.com/article/10.1007/s00707-018-2141-3
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorSaghir, Shahiden
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2018-04-24T07:48:28Z-
dc.date.available2018-04-24T07:48:28Z-
dc.date.issued2018-03-28en
dc.identifier.citationSaghir S, Younis MI (2018) An investigation of the mechanical behavior of initially curved microplates under electrostatic actuation. Acta Mechanica. Available: http://dx.doi.org/10.1007/s00707-018-2141-3.en
dc.identifier.issn0001-5970en
dc.identifier.issn1619-6937en
dc.identifier.doi10.1007/s00707-018-2141-3en
dc.identifier.urihttp://hdl.handle.net/10754/627620-
dc.description.abstractIn this article, we investigate the mechanical behavior of initially curved microplates under electrostatic actuation. Microplates are essential components of many Micro-Electro-Mechanical System devices; however, they commonly undergo an initial curvature imperfection, due to the microfabrication process. Initial curvature imperfection significantly affects the mechanical behavior of microplates. In this work, we derive a dynamic analogue of the von Kármán governing equation for such plates. These equations are then used to develop a reduced order model based on the Galerkin procedure to simulate the static and dynamic behavior of the microplate. Two profiles of initial curvature commonly encountered in microfabricated structures are considered, where one assumes a variation in shape along one dimension of the plate only (cylindrical bending shape) while the other assumes a variation in shape along both dimensions of the plate. Their effects on both the static and dynamic responses of the microplates are examined and compared. We validate the reduced order model by comparing the calculated static behavior and the fundamental natural frequency with those computed by a finite element model over a range of the initial plate rise. The static behavior of the microplate is investigated when varying the DC voltage. Then, the dynamic behavior of the microplate is examined under the application of a harmonic AC voltage superimposed to a DC voltage.en
dc.description.sponsorshipThis research was supported by the King Abdullah University of Science and Technology (KAUST) fund.en
dc.publisherSpringer Natureen
dc.relation.urlhttp://link.springer.com/article/10.1007/s00707-018-2141-3en
dc.titleAn investigation of the mechanical behavior of initially curved microplates under electrostatic actuationen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.contributor.department4700 King Abdullah University of Science and Technology (KAUST), Thuwal, 23955-6900, , Saudi Arabiaen
dc.identifier.journalActa Mechanicaen
dc.contributor.institutionUniversity of Management and Technology (UMT), Daska Road, Sialkot, , Pakistanen
kaust.authorSaghir, Shahiden
kaust.authorYounis, Mohammad I.en
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