A MEMS coupled resonator for frequency filtering in air

Handle URI:
http://hdl.handle.net/10754/627235
Title:
A MEMS coupled resonator for frequency filtering in air
Authors:
Ilyas, Saad ( 0000-0002-9389-9718 ) ; Jaber, Nizar; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Citation:
Ilyas S, Jaber N, Younis MI (2018) A MEMS coupled resonator for frequency filtering in air. Mechatronics. Available: http://dx.doi.org/10.1016/j.mechatronics.2018.01.002.
Publisher:
Elsevier BV
Journal:
Mechatronics
Issue Date:
3-Feb-2018
DOI:
10.1016/j.mechatronics.2018.01.002
Type:
Article
ISSN:
0957-4158
Sponsors:
This research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
Additional Links:
http://www.sciencedirect.com/science/article/pii/S0957415818300060
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorIlyas, Saaden
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2018-03-11T06:54:09Z-
dc.date.available2018-03-11T06:54:09Z-
dc.date.issued2018-02-03en
dc.identifier.citationIlyas S, Jaber N, Younis MI (2018) A MEMS coupled resonator for frequency filtering in air. Mechatronics. Available: http://dx.doi.org/10.1016/j.mechatronics.2018.01.002.en
dc.identifier.issn0957-4158en
dc.identifier.doi10.1016/j.mechatronics.2018.01.002en
dc.identifier.urihttp://hdl.handle.net/10754/627235-
dc.description.abstractWe present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.en
dc.description.sponsorshipThis research has been supported through King Abdullah University of Science and Technology (KAUST) fund.en
dc.publisherElsevier BVen
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S0957415818300060en
dc.subjectCoupled resonatoren
dc.subjectClamped–clamped beamen
dc.subjectFilteren
dc.subjectMixed-source excitationen
dc.subjectSqueeze film dampingen
dc.subjectSurface micromachiningen
dc.titleA MEMS coupled resonator for frequency filtering in airen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalMechatronicsen
kaust.authorIlyas, Saaden
kaust.authorJaber, Nizaren
kaust.authorYounis, Mohammad I.en
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