Scalable Pressure Sensor Based on Electrothermally Operated Resonator

Handle URI:
http://hdl.handle.net/10754/626180
Title:
Scalable Pressure Sensor Based on Electrothermally Operated Resonator
Authors:
Hajjaj, Amal Z.; Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Alcheikh, Nouha; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Citation:
Hajjaj AZ, Hafiz MAA, Alcheikh N, Younis MI (2017) Scalable Pressure Sensor Based on Electrothermally Operated Resonator. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/detc2017-67785.
Publisher:
ASME
Journal:
Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Issue Date:
3-Nov-2017
DOI:
10.1115/detc2017-67785
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662157
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-11-20T12:48:14Z-
dc.date.available2017-11-20T12:48:14Z-
dc.date.issued2017-11-03en
dc.identifier.citationHajjaj AZ, Hafiz MAA, Alcheikh N, Younis MI (2017) Scalable Pressure Sensor Based on Electrothermally Operated Resonator. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/detc2017-67785.en
dc.identifier.doi10.1115/detc2017-67785en
dc.identifier.urihttp://hdl.handle.net/10754/626180-
dc.description.abstractWe experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.en
dc.publisherASMEen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662157en
dc.rightsArchived with thanks to Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystemsen
dc.subjectPressure Sensoren
dc.subjectResonatoren
dc.subjectElectrothermal Actuationen
dc.subjectCooling effecten
dc.titleScalable Pressure Sensor Based on Electrothermally Operated Resonatoren
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, Saudi Arabiaen
dc.identifier.journalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystemsen
dc.eprint.versionPost-printen
kaust.authorHajjaj, Amal Z.en
kaust.authorHafiz, Md Abdullah Alen
kaust.authorAlcheikh, Nouhaen
kaust.authorYounis, Mohammad I.en
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