Effect of Initial Curvature on the Static and Dynamic Behavior of MEMS Resonators

Handle URI:
http://hdl.handle.net/10754/626177
Title:
Effect of Initial Curvature on the Static and Dynamic Behavior of MEMS Resonators
Authors:
Hajjaj, Amal Z.; Alcheikh, Nouha; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
In this paper, we investigate experimentally and analytically the effect of the initial shape, arc and cosine wave, on the static and dynamic behavior of microelectromechanical (MEMS) resonators. We show that by carefully choosing the geometrical parameters and the shape of curvature, the veering phenomenon (avoided-crossing) between the first two symmetric modes can be activated. To demonstrate this concept, we study electrothermally tuned and electrostatically driven MEMS initially curved resonators. Applying electrothermal voltage heats up the beams and then increases their curvature (stiffness) and controls their resonance frequencies. While changing the electrothermal voltage, we demonstrate high frequency tunability of arc resonators compared to the cosine-configuration resonators for the first and third resonance frequencies. For arc beams, we show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. Around the veering regime, we study experimentally and analytically, using a reduced order model based on a nonlinear Euler-Bernoulli shallow arch beam model, the dynamic behavior of the arc beam for different electrostatic forcing.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Citation:
Hajjaj AZ, Alcheikh N, Younis MI (2017) Effect of Initial Curvature on the Static and Dynamic Behavior of MEMS Resonators. Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2017-67791.
Publisher:
ASME
Journal:
Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Issue Date:
3-Nov-2017
DOI:
10.1115/detc2017-67791
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662371
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-11-20T12:48:14Z-
dc.date.available2017-11-20T12:48:14Z-
dc.date.issued2017-11-03en
dc.identifier.citationHajjaj AZ, Alcheikh N, Younis MI (2017) Effect of Initial Curvature on the Static and Dynamic Behavior of MEMS Resonators. Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2017-67791.en
dc.identifier.doi10.1115/detc2017-67791en
dc.identifier.urihttp://hdl.handle.net/10754/626177-
dc.description.abstractIn this paper, we investigate experimentally and analytically the effect of the initial shape, arc and cosine wave, on the static and dynamic behavior of microelectromechanical (MEMS) resonators. We show that by carefully choosing the geometrical parameters and the shape of curvature, the veering phenomenon (avoided-crossing) between the first two symmetric modes can be activated. To demonstrate this concept, we study electrothermally tuned and electrostatically driven MEMS initially curved resonators. Applying electrothermal voltage heats up the beams and then increases their curvature (stiffness) and controls their resonance frequencies. While changing the electrothermal voltage, we demonstrate high frequency tunability of arc resonators compared to the cosine-configuration resonators for the first and third resonance frequencies. For arc beams, we show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. Around the veering regime, we study experimentally and analytically, using a reduced order model based on a nonlinear Euler-Bernoulli shallow arch beam model, the dynamic behavior of the arc beam for different electrostatic forcing.en
dc.publisherASMEen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662371en
dc.rightsArchived with thanks to Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
dc.subjectInitially Curved Resonatoren
dc.subjectElectrothermal Actuationen
dc.subjectElectrostatic Actuationen
dc.subjectVeering Phenomenonen
dc.titleEffect of Initial Curvature on the Static and Dynamic Behavior of MEMS Resonatorsen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalVolume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
dc.eprint.versionPost-printen
kaust.authorHajjaj, Amal Z.en
kaust.authorAlcheikh, Nouhaen
kaust.authorYounis, Mohammad I.en
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