Nanoelectromechanical resonator for logic operations

Handle URI:
http://hdl.handle.net/10754/626004
Title:
Nanoelectromechanical resonator for logic operations
Authors:
Kazmi, Syed N. R.; Hafiz, Md A. Al; Chappanda, Karumbaiah N.; Ilyas, Saad ( 0000-0002-9389-9718 ) ; Holguin, Jorge; Da Costa, Pedro M. F. J. ( 0000-0002-1993-6701 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.
KAUST Department:
Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia; Integrated Circuits and Systems Group, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia; Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia
Citation:
Kazmi SNR, Hafiz MAA, Chappanda KN, Ilyas S, Holguin J, et al. (2017) Nanoelectromechanical resonator for logic operations. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/nems.2017.8016963.
Publisher:
IEEE
Journal:
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Conference/Event name:
12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Issue Date:
29-Aug-2017
DOI:
10.1109/nems.2017.8016963
Type:
Conference Paper
Sponsors:
The authors would like to thank the staff of Advanced Nanofabrication Imaging and Characterization lab for their help during the fabrication of the devices. We gratefully acknowledge KAUST for funding this project.
Additional Links:
http://ieeexplore.ieee.org/document/8016963/
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorKazmi, Syed N. R.en
dc.contributor.authorHafiz, Md A. Alen
dc.contributor.authorChappanda, Karumbaiah N.en
dc.contributor.authorIlyas, Saaden
dc.contributor.authorHolguin, Jorgeen
dc.contributor.authorDa Costa, Pedro M. F. J.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-10-30T08:39:49Z-
dc.date.available2017-10-30T08:39:49Z-
dc.date.issued2017-08-29en
dc.identifier.citationKazmi SNR, Hafiz MAA, Chappanda KN, Ilyas S, Holguin J, et al. (2017) Nanoelectromechanical resonator for logic operations. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/nems.2017.8016963.en
dc.identifier.doi10.1109/nems.2017.8016963en
dc.identifier.urihttp://hdl.handle.net/10754/626004-
dc.description.abstractWe report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.en
dc.description.sponsorshipThe authors would like to thank the staff of Advanced Nanofabrication Imaging and Characterization lab for their help during the fabrication of the devices. We gratefully acknowledge KAUST for funding this project.en
dc.publisherIEEEen
dc.relation.urlhttp://ieeexplore.ieee.org/document/8016963/en
dc.subjectElectro-thermal frequency modulationen
dc.subjectResonance frequencyen
dc.subjectNanoelectromechanical resonatoren
dc.subjectLogic operationsen
dc.subjectDoubly-clamped nanomechanical beamen
dc.subjectNanomechanical logicen
dc.subjectLogic computationen
dc.titleNanoelectromechanical resonator for logic operationsen
dc.typeConference Paperen
dc.contributor.departmentNano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabiaen
dc.contributor.departmentIntegrated Circuits and Systems Group, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabiaen
dc.contributor.departmentLaboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabiaen
dc.identifier.journal2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)en
dc.conference.date2017-04-09 to 2017-04-12en
dc.conference.name12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017en
dc.conference.locationLos Angeles, CA, USAen
kaust.authorKazmi, Syed N. R.en
kaust.authorHafiz, Md A. Alen
kaust.authorChappanda, Karumbaiah N.en
kaust.authorIlyas, Saaden
kaust.authorHolguin, Jorgeen
kaust.authorDa Costa, Pedro M. F. J.en
kaust.authorYounis, Mohammad I.en
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