Sensitive resonant gas sensor operating in air with metal organic frameworks coating

Handle URI:
http://hdl.handle.net/10754/625848
Title:
Sensitive resonant gas sensor operating in air with metal organic frameworks coating
Authors:
Jaber, Nizar; Ilyas, Saad ( 0000-0002-9389-9718 ) ; Shekhah, Osama ( 0000-0003-1861-9226 ) ; Eddaoudi, Mohamed ( 0000-0003-1916-9837 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, , Saudi Arabia
Citation:
Jaber N, Ilyas S, Shekhah O, Eddaoudi M, Younis MI (2017) Sensitive resonant gas sensor operating in air with metal organic frameworks coating. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Available: http://dx.doi.org/10.1109/TRANSDUCERS.2017.7994240.
Publisher:
IEEE
Journal:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Conference/Event name:
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Issue Date:
9-Aug-2017
DOI:
10.1109/TRANSDUCERS.2017.7994240
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/document/7994240/
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorJaber, Nizaren
dc.contributor.authorIlyas, Saaden
dc.contributor.authorShekhah, Osamaen
dc.contributor.authorEddaoudi, Mohameden
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-10-11T05:46:47Z-
dc.date.available2017-10-11T05:46:47Z-
dc.date.issued2017-08-09en
dc.identifier.citationJaber N, Ilyas S, Shekhah O, Eddaoudi M, Younis MI (2017) Sensitive resonant gas sensor operating in air with metal organic frameworks coating. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Available: http://dx.doi.org/10.1109/TRANSDUCERS.2017.7994240.en
dc.identifier.doi10.1109/TRANSDUCERS.2017.7994240en
dc.identifier.urihttp://hdl.handle.net/10754/625848-
dc.description.abstractWe report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.en
dc.publisherIEEEen
dc.relation.urlhttp://ieeexplore.ieee.org/document/7994240/en
dc.rights(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.en
dc.subjectelectrostatic actuationen
dc.subjectGas detectionen
dc.subjectselectivity and resonatorsen
dc.titleSensitive resonant gas sensor operating in air with metal organic frameworks coatingen
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, , Saudi Arabiaen
dc.identifier.journal2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)en
dc.conference.date2017-06-18 to 2017-06-22en
dc.conference.name19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017en
dc.conference.locationKaohsiung, TWNen
dc.eprint.versionPost-printen
kaust.authorJaber, Nizaren
kaust.authorIlyas, Saaden
kaust.authorShekhah, Osamaen
kaust.authorEddaoudi, Mohameden
kaust.authorYounis, Mohammad I.en
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