Transfer of preheat-treated SnO 2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor

Handle URI:
http://hdl.handle.net/10754/625722
Title:
Transfer of preheat-treated SnO 2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor
Authors:
Lee, Da Hoon; Kang, Sun Kil; Pak, Yusin; Lim, Namsoo; Lee, Ryeri; Kumaresan, Yogeenth; Lee, Sungeun; Lee, Chaedeok; Ham, Moon-Ho; Jung, Gun Young
Abstract:
The progress in developing the microelectromechanical system (MEMS) heater-based SnO2 gas sensors was hindered by the subsequent heat treatment of the tin oxide (SnO2), nevertheless it is required to obtain excellent sensor characteristics. During the sintering process, the MEMS heater and the contact electrodes can be degraded at such a high temperature, which could reduce the sensor response and reliability. In this research, we presented a process of preheating the printed SnO2 sensing layer on top of a sacrificial bridge-type ZnO layer at such a high temperature, followed by transferring it onto the contact electrodes of sensor device by selective etching of the sacrificial ZnO layer. Therefore, the sensor device was not exposed to the high sintering temperature. The SnO2 gas sensor fabricated by the transfer process exhibited a rectangular sensing curve behavior with a rapid response of 52 s at 20 ppm ethanol concentration. In addition, reliable and repeatable sensing characteristics were obtained even at an ethanol gas concentration of 5 ppm.
KAUST Department:
King Abdullah University of Science and Technology, Saudi Arabia
Citation:
Lee DH, Kang SK, Pak Y, Lim N, Lee R, et al. (2018) Transfer of preheat-treated SnO 2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor. Sensors and Actuators B: Chemical 255: 70–77. Available: http://dx.doi.org/10.1016/j.snb.2017.08.025.
Publisher:
Elsevier BV
Journal:
Sensors and Actuators B: Chemical
Issue Date:
5-Aug-2017
DOI:
10.1016/j.snb.2017.08.025
Type:
Article
ISSN:
0925-4005
Sponsors:
This work was supported by the Materials & Devices Advanced Research Institute of LG Electronics Inc. in Seoul, Korea, and by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2013R1A1A2061494).
Additional Links:
http://www.sciencedirect.com/science/article/pii/S0925400517314478
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorLee, Da Hoonen
dc.contributor.authorKang, Sun Kilen
dc.contributor.authorPak, Yusinen
dc.contributor.authorLim, Namsooen
dc.contributor.authorLee, Ryerien
dc.contributor.authorKumaresan, Yogeenthen
dc.contributor.authorLee, Sungeunen
dc.contributor.authorLee, Chaedeoken
dc.contributor.authorHam, Moon-Hoen
dc.contributor.authorJung, Gun Youngen
dc.date.accessioned2017-10-03T12:49:36Z-
dc.date.available2017-10-03T12:49:36Z-
dc.date.issued2017-08-05en
dc.identifier.citationLee DH, Kang SK, Pak Y, Lim N, Lee R, et al. (2018) Transfer of preheat-treated SnO 2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor. Sensors and Actuators B: Chemical 255: 70–77. Available: http://dx.doi.org/10.1016/j.snb.2017.08.025.en
dc.identifier.issn0925-4005en
dc.identifier.doi10.1016/j.snb.2017.08.025en
dc.identifier.urihttp://hdl.handle.net/10754/625722-
dc.description.abstractThe progress in developing the microelectromechanical system (MEMS) heater-based SnO2 gas sensors was hindered by the subsequent heat treatment of the tin oxide (SnO2), nevertheless it is required to obtain excellent sensor characteristics. During the sintering process, the MEMS heater and the contact electrodes can be degraded at such a high temperature, which could reduce the sensor response and reliability. In this research, we presented a process of preheating the printed SnO2 sensing layer on top of a sacrificial bridge-type ZnO layer at such a high temperature, followed by transferring it onto the contact electrodes of sensor device by selective etching of the sacrificial ZnO layer. Therefore, the sensor device was not exposed to the high sintering temperature. The SnO2 gas sensor fabricated by the transfer process exhibited a rectangular sensing curve behavior with a rapid response of 52 s at 20 ppm ethanol concentration. In addition, reliable and repeatable sensing characteristics were obtained even at an ethanol gas concentration of 5 ppm.en
dc.description.sponsorshipThis work was supported by the Materials & Devices Advanced Research Institute of LG Electronics Inc. in Seoul, Korea, and by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2013R1A1A2061494).en
dc.publisherElsevier BVen
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S0925400517314478en
dc.subjectBridge-type ZnO layeren
dc.subjectPreheating of SnO2 sensing layeren
dc.subjectGas sensoren
dc.subjectTransferen
dc.titleTransfer of preheat-treated SnO 2 via a sacrificial bridge-type ZnO layer for ethanol gas sensoren
dc.typeArticleen
dc.contributor.departmentKing Abdullah University of Science and Technology, Saudi Arabiaen
dc.identifier.journalSensors and Actuators B: Chemicalen
dc.contributor.institutionSchool of Materials Science and Engineering, Gwangju Institute of Science and Technology, 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Koreaen
dc.contributor.institutionMaterials & Production Engineering Research Institute Division, Sensor Solution Lab., LG Electronics, Woomyeon R&D Campus, 38 Baumoe-ro, Seocho-gu, Seoul, 06763, Republic of Koreaen
kaust.authorPak, Yusinen
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.