Highly Tunable Narrow Bandpass MEMS Filter

Handle URI:
http://hdl.handle.net/10754/625667
Title:
Highly Tunable Narrow Bandpass MEMS Filter
Authors:
Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Kosuru, Lakshmoji ( 0000-0003-3813-9262 ) ; Hajjaj, Amal Z.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Hafiz MAA, Kosuru L, Hajjaj AZ, Younis MI (2017) Highly Tunable Narrow Bandpass MEMS Filter. IEEE Transactions on Electron Devices 64: 3392–3398. Available: http://dx.doi.org/10.1109/TED.2017.2716949.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
IEEE Transactions on Electron Devices
Issue Date:
7-Jul-2017
DOI:
10.1109/TED.2017.2716949
Type:
Article
ISSN:
0018-9383; 1557-9646
Sponsors:
This work was supported by the King Abdullah University of Science and Technology.
Additional Links:
http://ieeexplore.ieee.org/document/7971946/
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorKosuru, Lakshmojien
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-10-03T12:49:32Z-
dc.date.available2017-10-03T12:49:32Z-
dc.date.issued2017-07-07en
dc.identifier.citationHafiz MAA, Kosuru L, Hajjaj AZ, Younis MI (2017) Highly Tunable Narrow Bandpass MEMS Filter. IEEE Transactions on Electron Devices 64: 3392–3398. Available: http://dx.doi.org/10.1109/TED.2017.2716949.en
dc.identifier.issn0018-9383en
dc.identifier.issn1557-9646en
dc.identifier.doi10.1109/TED.2017.2716949en
dc.identifier.urihttp://hdl.handle.net/10754/625667-
dc.description.abstractWe demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.en
dc.description.sponsorshipThis work was supported by the King Abdullah University of Science and Technology.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7971946/en
dc.subjectBandwidthen
dc.subjectMicrocavitiesen
dc.subjectMicromechanical devicesen
dc.subjectPassbanden
dc.subjectResonant frequencyen
dc.subjectResonatorsen
dc.subjectTuningen
dc.titleHighly Tunable Narrow Bandpass MEMS Filteren
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalIEEE Transactions on Electron Devicesen
kaust.authorHafiz, Md Abdullah Alen
kaust.authorKosuru, Lakshmojien
kaust.authorHajjaj, Amal Z.en
kaust.authorYounis, Mohammad I.en
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