The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

Handle URI:
http://hdl.handle.net/10754/625265
Title:
The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes
Authors:
Hajjaj, Amal Z.; Alcheikh, Nouha; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We investigate experimentally and analytically the effect of initial shapes, arc and cosine wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch resonators. We show that by carefully choosing the geometrical parameters and the initial shape of the arch, the veering phenomenon (avoided-crossing) among the first two symmetric modes can be strongly activated. To demonstrate this, we study electrothermally tuned and electrostatically driven initially curved MEMS resonators. Upon changing the electrothermal voltage, we demonstrate high frequency tunability of arc resonators compared to the cosine-configuration resonators for the first and third resonance frequencies. For arc beams, we show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. Around the veering regime, we study experimentally and analytically the dynamic behavior of the arc beam for different electrostatic loads. The analytical study is based on a reduced order model of a nonlinear Euler–Bernoulli shallow arch beam model. The veering phenomenon is also confirmed through a finite-element multi-physics and nonlinear model.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Hajjaj AZ, Alcheikh N, Younis MI (2017) The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes. International Journal of Non-Linear Mechanics. Available: http://dx.doi.org/10.1016/j.ijnonlinmec.2017.07.002.
Publisher:
Elsevier BV
Journal:
International Journal of Non-Linear Mechanics
Issue Date:
19-Jul-2017
DOI:
10.1016/j.ijnonlinmec.2017.07.002
Type:
Article
ISSN:
0020-7462
Sponsors:
This research was support by KAUST.
Additional Links:
http://www.sciencedirect.com/science/article/pii/S002074621730224X
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-07-26T06:19:11Z-
dc.date.available2017-07-26T06:19:11Z-
dc.date.issued2017-07-19en
dc.identifier.citationHajjaj AZ, Alcheikh N, Younis MI (2017) The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes. International Journal of Non-Linear Mechanics. Available: http://dx.doi.org/10.1016/j.ijnonlinmec.2017.07.002.en
dc.identifier.issn0020-7462en
dc.identifier.doi10.1016/j.ijnonlinmec.2017.07.002en
dc.identifier.urihttp://hdl.handle.net/10754/625265-
dc.description.abstractWe investigate experimentally and analytically the effect of initial shapes, arc and cosine wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch resonators. We show that by carefully choosing the geometrical parameters and the initial shape of the arch, the veering phenomenon (avoided-crossing) among the first two symmetric modes can be strongly activated. To demonstrate this, we study electrothermally tuned and electrostatically driven initially curved MEMS resonators. Upon changing the electrothermal voltage, we demonstrate high frequency tunability of arc resonators compared to the cosine-configuration resonators for the first and third resonance frequencies. For arc beams, we show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. Around the veering regime, we study experimentally and analytically the dynamic behavior of the arc beam for different electrostatic loads. The analytical study is based on a reduced order model of a nonlinear Euler–Bernoulli shallow arch beam model. The veering phenomenon is also confirmed through a finite-element multi-physics and nonlinear model.en
dc.description.sponsorshipThis research was support by KAUST.en
dc.publisherElsevier BVen
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S002074621730224Xen
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in International Journal of Non-Linear Mechanics. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in International Journal of Non-Linear Mechanics, [, , (2017-07-19)] DOI: 10.1016/j.ijnonlinmec.2017.07.002 . © 2017. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectArchen
dc.subjectNonlinearityen
dc.subjectVibrationsen
dc.subjectMicro and nano systemsen
dc.subjectVeeringen
dc.subjectNear-crossingen
dc.subjectElectrothermal and electrostatic actuationen
dc.titleThe static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapesen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalInternational Journal of Non-Linear Mechanicsen
dc.eprint.versionPost-printen
kaust.authorHajjaj, Amal Z.en
kaust.authorAlcheikh, Nouhaen
kaust.authorYounis, Mohammad I.en
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