Electrothermally Tunable Arch Resonator

Handle URI:
http://hdl.handle.net/10754/623828
Title:
Electrothermally Tunable Arch Resonator
Authors:
Hajjaj, Amal Z.; Ramini, Abdallah; Alcheikh, Nouha; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
This paper demonstrates experimentally, theoretically, and numerically a wide-range tunability of electrothermally actuated microelectromechanical arch beams. The beams are made of silicon and are intentionally fabricated with some curvature as in-plane shallow arches. An electrothermal voltage is applied between the anchors of the beam generating a current that controls the axial stress caused by thermal expansion. When the electrothermal voltage increases, the compressive stress increases inside the arch beam. This leads to an increase in its curvature, thereby increasing its resonance frequencies. We show here that the first resonance frequency can increase monotonically up to twice its initial value. We show also that after some electrothermal voltage load, the third resonance frequency starts to become more sensitive to the axial thermal stress, while the first resonance frequency becomes less sensitive. These results can be used as guidelines to utilize arches as wide-range tunable resonators. Analytical results based on the nonlinear Euler Bernoulli beam theory are generated and compared with the experimental data and the results of a multi-physics finite-element model. A good agreement is found among all the results. [2016-0291]
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Hajjaj AZ, Ramini A, Alcheikh N, Younis MI (2017) Electrothermally Tunable Arch Resonator. Journal of Microelectromechanical Systems: 1–9. Available: http://dx.doi.org/10.1109/JMEMS.2017.2676006.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
Journal of Microelectromechanical Systems
Issue Date:
18-Mar-2017
DOI:
10.1109/JMEMS.2017.2676006
Type:
Article
ISSN:
1057-7157; 1941-0158
Additional Links:
http://ieeexplore.ieee.org/document/7880562/
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-05-31T11:23:08Z-
dc.date.available2017-05-31T11:23:08Z-
dc.date.issued2017-03-18en
dc.identifier.citationHajjaj AZ, Ramini A, Alcheikh N, Younis MI (2017) Electrothermally Tunable Arch Resonator. Journal of Microelectromechanical Systems: 1–9. Available: http://dx.doi.org/10.1109/JMEMS.2017.2676006.en
dc.identifier.issn1057-7157en
dc.identifier.issn1941-0158en
dc.identifier.doi10.1109/JMEMS.2017.2676006en
dc.identifier.urihttp://hdl.handle.net/10754/623828-
dc.description.abstractThis paper demonstrates experimentally, theoretically, and numerically a wide-range tunability of electrothermally actuated microelectromechanical arch beams. The beams are made of silicon and are intentionally fabricated with some curvature as in-plane shallow arches. An electrothermal voltage is applied between the anchors of the beam generating a current that controls the axial stress caused by thermal expansion. When the electrothermal voltage increases, the compressive stress increases inside the arch beam. This leads to an increase in its curvature, thereby increasing its resonance frequencies. We show here that the first resonance frequency can increase monotonically up to twice its initial value. We show also that after some electrothermal voltage load, the third resonance frequency starts to become more sensitive to the axial thermal stress, while the first resonance frequency becomes less sensitive. These results can be used as guidelines to utilize arches as wide-range tunable resonators. Analytical results based on the nonlinear Euler Bernoulli beam theory are generated and compared with the experimental data and the results of a multi-physics finite-element model. A good agreement is found among all the results. [2016-0291]en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7880562/en
dc.subjectelectrothermal actuation.en
dc.subjectTunabilityen
dc.subjectarch resonatoren
dc.titleElectrothermally Tunable Arch Resonatoren
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Microelectromechanical Systemsen
kaust.authorHajjaj, Amal Z.en
kaust.authorRamini, Abdallahen
kaust.authorAlcheikh, Nouhaen
kaust.authorYounis, Mohammad I.en
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