The effects of initial rise and axial loads on MEMS arches

Handle URI:
http://hdl.handle.net/10754/623252
Title:
The effects of initial rise and axial loads on MEMS arches
Authors:
Tella, Sherif A.; Hajjaj, Amal Z.; Younis, Mohammed Ibrahim
Abstract:
Arch microbeams have been utilized and proposed for many uses over the past few years due to their large tunability and bistability. However, recent experimental data have shown different mechanical behavior of arches when subjected to axial loads. This paper aims to investigate in depth the influence of the competing effects of initial rise and axial loads on the mechanical behavior of micromachined arches; mainly their static deflection and resonant frequencies. Based on analytical solutions, the static response and eigenvalue problems are analyzed for various values of initial rises and axial loads. Universal curves showing the variation of the first three resonance frequencies of the arch are generated for various values of initial rise under both tensile and compressive axial loads. This study shows that increasing the tensile or compressive axial loads for different values of initial rise may lead to either increase in the stiffness of the beam or initial decrease in the stiffness, which later increases as the axial load is increased depending on the dominant effect of the initial rise of the arch and the axial load. The obtained universal curves represent useful design tools to predict the tunability of arches under axial loads for various values of initial rises. The use of the universal curves is demonstrated with an experimental case study. Analytical formulation is developed to predict the point of minimum where the trend of the resonance frequency versus axial loads changes qualitatively due to the competing effects of axial loads and initial curvature.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Tella SA, Hajjaj AZ, Younis MI (2017) The effects of initial rise and axial loads on MEMS arches. Journal of Vibration and Acoustics. Available: http://dx.doi.org/10.1115/1.4036400.
Publisher:
ASME International
Journal:
Journal of Vibration and Acoustics
Issue Date:
7-Apr-2017
DOI:
10.1115/1.4036400
Type:
Article
ISSN:
1048-9002
Sponsors:
This research has been support by KAUST.
Additional Links:
http://vibrationacoustics.asmedigitalcollection.asme.org/article.aspx?articleid=2618328
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorTella, Sherif A.en
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorYounis, Mohammed Ibrahimen
dc.date.accessioned2017-04-17T11:33:47Z-
dc.date.available2017-04-17T11:33:47Z-
dc.date.issued2017-04-07en
dc.identifier.citationTella SA, Hajjaj AZ, Younis MI (2017) The effects of initial rise and axial loads on MEMS arches. Journal of Vibration and Acoustics. Available: http://dx.doi.org/10.1115/1.4036400.en
dc.identifier.issn1048-9002en
dc.identifier.doi10.1115/1.4036400en
dc.identifier.urihttp://hdl.handle.net/10754/623252-
dc.description.abstractArch microbeams have been utilized and proposed for many uses over the past few years due to their large tunability and bistability. However, recent experimental data have shown different mechanical behavior of arches when subjected to axial loads. This paper aims to investigate in depth the influence of the competing effects of initial rise and axial loads on the mechanical behavior of micromachined arches; mainly their static deflection and resonant frequencies. Based on analytical solutions, the static response and eigenvalue problems are analyzed for various values of initial rises and axial loads. Universal curves showing the variation of the first three resonance frequencies of the arch are generated for various values of initial rise under both tensile and compressive axial loads. This study shows that increasing the tensile or compressive axial loads for different values of initial rise may lead to either increase in the stiffness of the beam or initial decrease in the stiffness, which later increases as the axial load is increased depending on the dominant effect of the initial rise of the arch and the axial load. The obtained universal curves represent useful design tools to predict the tunability of arches under axial loads for various values of initial rises. The use of the universal curves is demonstrated with an experimental case study. Analytical formulation is developed to predict the point of minimum where the trend of the resonance frequency versus axial loads changes qualitatively due to the competing effects of axial loads and initial curvature.en
dc.description.sponsorshipThis research has been support by KAUST.en
dc.publisherASME Internationalen
dc.relation.urlhttp://vibrationacoustics.asmedigitalcollection.asme.org/article.aspx?articleid=2618328en
dc.rightsArchived with thanks to Journal of Vibration and Acousticsen
dc.subjectArchesen
dc.subjectStressen
dc.subjectMicroelectromechanical systemsen
dc.subjectResonanceen
dc.subjectStiffnessen
dc.subjectMechanical behavioren
dc.subjectDeflectionen
dc.subjectEigenvaluesen
dc.subjectMicromachiningen
dc.subjectDesignen
dc.titleThe effects of initial rise and axial loads on MEMS archesen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Vibration and Acousticsen
dc.eprint.versionPost-printen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York, Binghamton, NY 13902, USAen
kaust.authorTella, Sherif A.en
kaust.authorYounis, Mohammed Ibrahimen
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