An experimental and theoretical investigation of the mechanical behavior of multilayer initially curved microplates under electrostatic actuation

Handle URI:
http://hdl.handle.net/10754/623246
Title:
An experimental and theoretical investigation of the mechanical behavior of multilayer initially curved microplates under electrostatic actuation
Authors:
Saghir, Shahid ( 0000-0001-8045-0228 ) ; Ilyas, Saad ( 0000-0002-9389-9718 ) ; Jaber, Nizar; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We investigate the static and dynamic behavior of a multilayer clamped-free-clamped-free (CFCF) microplate, which is made of polyimide, gold, chromium, and nickel. The microplate is slightly curved away from a stationary electrode and is electrostatically actuated. The free and forced vibrations of the microplate are examined. First, we experimentally investigate the variation of the first natural frequency under the electrostatic DC load. Then, the forced dynamic behavior is investigated by applying a harmonic AC voltage superimposed to a DC voltage. Results are shown demonstrating the transition of the dynamic response of the microplate from hardening to softening as the DC voltage is changed as well the dynamic pull-in phenomenon. For theoretical model, we adopt a dynamic analog of the von-Karman governing equations accounting for initial curvature imperfection. These equations are then used to develop a reduced order model based on the Galerkin procedure to simulate the mechanical behavior of the microplate. We compare the theoretical results with experimental data and show excellent agreement among the results. We also examine the effect of the initial rise on the natural frequencies of first three symmetric-symmetric modes of the plate.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Citation:
Saghir S, Ilyas S, Jaber N, Younis MI (2017) An experimental and theoretical investigation of the mechanical behavior of multilayer initially curved microplates under electrostatic actuation. Journal of Vibration and Acoustics. Available: http://dx.doi.org/10.1115/1.4036398.
Publisher:
ASME International
Journal:
Journal of Vibration and Acoustics
Issue Date:
7-Apr-2017
DOI:
10.1115/1.4036398
Type:
Article
ISSN:
1048-9002
Additional Links:
http://vibrationacoustics.asmedigitalcollection.asme.org/article.aspx?articleid=2618326
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorSaghir, Shahiden
dc.contributor.authorIlyas, Saaden
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-04-17T11:33:46Z-
dc.date.available2017-04-17T11:33:46Z-
dc.date.issued2017-04-07en
dc.identifier.citationSaghir S, Ilyas S, Jaber N, Younis MI (2017) An experimental and theoretical investigation of the mechanical behavior of multilayer initially curved microplates under electrostatic actuation. Journal of Vibration and Acoustics. Available: http://dx.doi.org/10.1115/1.4036398.en
dc.identifier.issn1048-9002en
dc.identifier.doi10.1115/1.4036398en
dc.identifier.urihttp://hdl.handle.net/10754/623246-
dc.description.abstractWe investigate the static and dynamic behavior of a multilayer clamped-free-clamped-free (CFCF) microplate, which is made of polyimide, gold, chromium, and nickel. The microplate is slightly curved away from a stationary electrode and is electrostatically actuated. The free and forced vibrations of the microplate are examined. First, we experimentally investigate the variation of the first natural frequency under the electrostatic DC load. Then, the forced dynamic behavior is investigated by applying a harmonic AC voltage superimposed to a DC voltage. Results are shown demonstrating the transition of the dynamic response of the microplate from hardening to softening as the DC voltage is changed as well the dynamic pull-in phenomenon. For theoretical model, we adopt a dynamic analog of the von-Karman governing equations accounting for initial curvature imperfection. These equations are then used to develop a reduced order model based on the Galerkin procedure to simulate the mechanical behavior of the microplate. We compare the theoretical results with experimental data and show excellent agreement among the results. We also examine the effect of the initial rise on the natural frequencies of first three symmetric-symmetric modes of the plate.en
dc.publisherASME Internationalen
dc.relation.urlhttp://vibrationacoustics.asmedigitalcollection.asme.org/article.aspx?articleid=2618326en
dc.rightsArchived with thanks to Journal of Vibration and Acousticsen
dc.subjectMechanical behavioren
dc.subjectMicroplatesen
dc.subjectAccountingen
dc.subjectVibrationen
dc.subjectDynamic responseen
dc.subjectNickelen
dc.subjectStressen
dc.subjectHardeningen
dc.subjectElectrodesen
dc.titleAn experimental and theoretical investigation of the mechanical behavior of multilayer initially curved microplates under electrostatic actuationen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalJournal of Vibration and Acousticsen
dc.eprint.versionPost-printen
dc.contributor.institutionUniversity of Management and Technology (UMT), Daska Road, Sialkot, Pakistanen
kaust.authorSaghir, Shahiden
kaust.authorIlyas, Saaden
kaust.authorJaber, Nizaren
kaust.authorYounis, Mohammad I.en
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