Mass and Position Determination in MEMS Resonant Mass Sensors: Theoretical and Experimental Investigation

Handle URI:
http://hdl.handle.net/10754/623233
Title:
Mass and Position Determination in MEMS Resonant Mass Sensors: Theoretical and Experimental Investigation
Authors:
Bouchaala, Adam M.; Nayfeh, Ali H.; Jaber, Nizar; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present a method to determine accurately the position and mass of an entity attached to the surface of an electrostatically actuated clamped-clamped microbeam implemented as a mass sensor. In the theoretical investigation, the microbeam is modeled as a nonlinear Euler-Bernoulli beam and a perturbation technique is used to develop a closed-form expression for the frequency shift due to an added mass at a specific location on the microbeam surface. The experimental investigation was conducted on a microbeam made of Polyimide with a special lower electrode to excite both of the first and second modes of vibration. Using an ink-jet printer, we deposited droplets of polymers with a defined mass and position on the surface of the microbeam and we measured the shifts in its resonance frequencies. The theoretical predictions of the mass and position of the deposited droplets match well with the experimental measurements.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Citation:
Bouchaala A, Nayfeh AH, Jaber N, Younis MI (2016) Mass and Position Determination in MEMS Resonant Mass Sensors: Theoretical and Experimental Investigation. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59813.
Publisher:
ASME International
Journal:
Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Issue Date:
5-Dec-2016
DOI:
10.1115/detc2016-59813
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592071
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorBouchaala, Adam M.en
dc.contributor.authorNayfeh, Ali H.en
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-04-15T11:15:46Z-
dc.date.available2017-04-15T11:15:46Z-
dc.date.issued2016-12-05en
dc.identifier.citationBouchaala A, Nayfeh AH, Jaber N, Younis MI (2016) Mass and Position Determination in MEMS Resonant Mass Sensors: Theoretical and Experimental Investigation. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59813.en
dc.identifier.doi10.1115/detc2016-59813en
dc.identifier.urihttp://hdl.handle.net/10754/623233-
dc.description.abstractWe present a method to determine accurately the position and mass of an entity attached to the surface of an electrostatically actuated clamped-clamped microbeam implemented as a mass sensor. In the theoretical investigation, the microbeam is modeled as a nonlinear Euler-Bernoulli beam and a perturbation technique is used to develop a closed-form expression for the frequency shift due to an added mass at a specific location on the microbeam surface. The experimental investigation was conducted on a microbeam made of Polyimide with a special lower electrode to excite both of the first and second modes of vibration. Using an ink-jet printer, we deposited droplets of polymers with a defined mass and position on the surface of the microbeam and we measured the shifts in its resonance frequencies. The theoretical predictions of the mass and position of the deposited droplets match well with the experimental measurements.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592071en
dc.titleMass and Position Determination in MEMS Resonant Mass Sensors: Theoretical and Experimental Investigationen
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, Saudi Arabiaen
dc.identifier.journalVolume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
dc.contributor.institutionVirginia Polytechnic Institute and State University, Blacksburg, VAen
kaust.authorBouchaala, Adam M.en
kaust.authorJaber, Nizaren
kaust.authorYounis, Mohammad I.en
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