Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment

Handle URI:
http://hdl.handle.net/10754/623232
Title:
Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment
Authors:
Saghir, Shahid ( 0000-0001-8045-0228 ) ; Bellaredj, Mohammed Lamine Faycal ( 0000-0001-6959-2911 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Citation:
Saghir S, Bellaredj ML, Younis MI (2016) Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment. Volume 8: 28th Conference on Mechanical Vibration and Noise. Available: http://dx.doi.org/10.1115/detc2016-59838.
Publisher:
ASME International
Journal:
Volume 8: 28th Conference on Mechanical Vibration and Noise
Issue Date:
5-Dec-2016
DOI:
10.1115/detc2016-59838
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592166
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorSaghir, Shahiden
dc.contributor.authorBellaredj, Mohammed Lamine Faycalen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-04-15T11:15:46Z-
dc.date.available2017-04-15T11:15:46Z-
dc.date.issued2016-12-05en
dc.identifier.citationSaghir S, Bellaredj ML, Younis MI (2016) Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment. Volume 8: 28th Conference on Mechanical Vibration and Noise. Available: http://dx.doi.org/10.1115/detc2016-59838.en
dc.identifier.doi10.1115/detc2016-59838en
dc.identifier.urihttp://hdl.handle.net/10754/623232-
dc.description.abstractMicroplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592166en
dc.titleInitially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experimenten
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, Saudi Arabiaen
dc.identifier.journalVolume 8: 28th Conference on Mechanical Vibration and Noiseen
kaust.authorSaghir, Shahiden
kaust.authorBellaredj, Mohammed Lamine Faycalen
kaust.authorYounis, Mohammad I.en
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