Highly Tunable Electrothermally Actuated Arch Resonator

Handle URI:
http://hdl.handle.net/10754/623228
Title:
Highly Tunable Electrothermally Actuated Arch Resonator
Authors:
Hajjaj, Amal Z.; Ramini, Abdallah; Alcheikh, Nouha; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
This paper demonstrates experimentally, theoretically, and numerically a wide-range tunability of electrothermally actuated MEMS arch beams. The beams are made of silicon and are intentionally fabricated with some curvature as in-plane shallow arches. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared to the experimental data and results of a multi-physics finite-element model. A good agreement is found among all the results. The electrothermal voltage is applied between the anchors of the clamped-clamped MEMS arch beam, generating a current that passes through the MEMS arch beam and controls its axial stress caused by thermal expansion. When the electrothermal voltage increases, the compressive stress increases inside the arch beam. This leads to increase in its curvature, thereby increases the resonance frequencies of the structure. We show here that the first resonance frequency can increase up to twice its initial value. We show also that after some electro-thermal voltage load, the third resonance frequency starts to become more sensitive to the axial thermal stress, while the first resonance frequency becomes less sensitive. These results can be used as guidelines to utilize arches as wide-range tunable resonators.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Citation:
Hajjaj AZ, Ramini A, Alcheikh N, Younis MI (2016) Highly Tunable Electrothermally Actuated Arch Resonator. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59898.
Publisher:
ASME International
Journal:
Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Issue Date:
5-Dec-2016
DOI:
10.1115/detc2016-59898
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592032
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-04-15T11:15:45Z-
dc.date.available2017-04-15T11:15:45Z-
dc.date.issued2016-12-05en
dc.identifier.citationHajjaj AZ, Ramini A, Alcheikh N, Younis MI (2016) Highly Tunable Electrothermally Actuated Arch Resonator. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59898.en
dc.identifier.doi10.1115/detc2016-59898en
dc.identifier.urihttp://hdl.handle.net/10754/623228-
dc.description.abstractThis paper demonstrates experimentally, theoretically, and numerically a wide-range tunability of electrothermally actuated MEMS arch beams. The beams are made of silicon and are intentionally fabricated with some curvature as in-plane shallow arches. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared to the experimental data and results of a multi-physics finite-element model. A good agreement is found among all the results. The electrothermal voltage is applied between the anchors of the clamped-clamped MEMS arch beam, generating a current that passes through the MEMS arch beam and controls its axial stress caused by thermal expansion. When the electrothermal voltage increases, the compressive stress increases inside the arch beam. This leads to increase in its curvature, thereby increases the resonance frequencies of the structure. We show here that the first resonance frequency can increase up to twice its initial value. We show also that after some electro-thermal voltage load, the third resonance frequency starts to become more sensitive to the axial thermal stress, while the first resonance frequency becomes less sensitive. These results can be used as guidelines to utilize arches as wide-range tunable resonators.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592032en
dc.subjectTunabilityen
dc.subjectArch Resonatoren
dc.subjectElectrothermal Actuationen
dc.titleHighly Tunable Electrothermally Actuated Arch Resonatoren
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, Saudi Arabiaen
dc.identifier.journalVolume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
kaust.authorHajjaj, Amal Z.en
kaust.authorRamini, Abdallahen
kaust.authorAlcheikh, Nouhaen
kaust.authorYounis, Mohammad I.en
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