Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

Handle URI:
http://hdl.handle.net/10754/623227
Title:
Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators
Authors:
Ramini, Abdallah; Hajjaj, Amal Z.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Citation:
Ramini A, Hajjaj A, Younis MI (2016) Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59538.
Publisher:
ASME International
Journal:
Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Issue Date:
5-Dec-2016
DOI:
10.1115/detc2016-59538
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592031
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-04-15T11:15:45Z-
dc.date.available2017-04-15T11:15:45Z-
dc.date.issued2016-12-05en
dc.identifier.citationRamini A, Hajjaj A, Younis MI (2016) Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59538.en
dc.identifier.doi10.1115/detc2016-59538en
dc.identifier.urihttp://hdl.handle.net/10754/623227-
dc.description.abstractWe demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592031en
dc.subjectResonanceen
dc.subjectArchesen
dc.subjectMicroelectromechanical systemsen
dc.titleExperimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonatorsen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalVolume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
kaust.authorRamini, Abdallahen
kaust.authorHajjaj, Amal Z.en
kaust.authorYounis, Mohammad I.en
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