A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

Handle URI:
http://hdl.handle.net/10754/622930
Title:
A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications
Authors:
Nassar, Joanna M. ( 0000-0003-4463-8877 ) ; Sevilla, Galo T. ( 0000-0002-9419-4437 ) ; Velling, Seneca J.; Cordero, Marlon D.; Hussain, Muhammad Mustafa ( 0000-0003-3279-0441 )
Abstract:
We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Integrated Disruptive Electronic Applications (IDEA) Lab; Integrated Nanotechnology Lab
Citation:
Nassar JM, Sevilla GAT, Velling SJ, Cordero MD, Hussain MM (2016) A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. 2016 IEEE International Electron Devices Meeting (IEDM). Available: http://dx.doi.org/10.1109/IEDM.2016.7838448.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2016 IEEE International Electron Devices Meeting (IEDM)
Issue Date:
7-Feb-2017
DOI:
10.1109/IEDM.2016.7838448
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/document/7838448/
Appears in Collections:
Conference Papers; Integrated Nanotechnology Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorNassar, Joanna M.en
dc.contributor.authorSevilla, Galo T.en
dc.contributor.authorVelling, Seneca J.en
dc.contributor.authorCordero, Marlon D.en
dc.contributor.authorHussain, Muhammad Mustafaen
dc.date.accessioned2017-02-28T11:32:08Z-
dc.date.available2017-02-28T11:32:08Z-
dc.date.issued2017-02-07en
dc.identifier.citationNassar JM, Sevilla GAT, Velling SJ, Cordero MD, Hussain MM (2016) A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. 2016 IEEE International Electron Devices Meeting (IEDM). Available: http://dx.doi.org/10.1109/IEDM.2016.7838448.en
dc.identifier.doi10.1109/IEDM.2016.7838448en
dc.identifier.urihttp://hdl.handle.net/10754/622930-
dc.description.abstractWe report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7838448/en
dc.rights(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.en
dc.titleA CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applicationsen
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentIntegrated Disruptive Electronic Applications (IDEA) Laben
dc.contributor.departmentIntegrated Nanotechnology Laben
dc.identifier.journal2016 IEEE International Electron Devices Meeting (IEDM)en
dc.eprint.versionPost-printen
dc.contributor.institutionMaterial & Nanoscience Program, Faculty of Science, University of Waterloo, Waterloo ON, N2L-3G1, Canadaen
kaust.authorNassar, Joanna M.en
kaust.authorSevilla, Galo T.en
kaust.authorCordero, Marlon D.en
kaust.authorHussain, Muhammad Mustafaen
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