Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

Handle URI:
http://hdl.handle.net/10754/622876
Title:
Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
Authors:
Alcheikh, Nouha; Ramini, Abdallah; Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present a simulation and experimental investigation of bi-directional tunable in-plane clamped-guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Citation:
Alcheikh N, Ramini A, Hafiz M, Younis M (2017) Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads. Micromachines 8: 14. Available: http://dx.doi.org/10.3390/mi8010014.
Publisher:
MDPI AG
Journal:
Micromachines
Issue Date:
4-Jan-2017
DOI:
10.3390/mi8010014
Type:
Article
ISSN:
2072-666X
Sponsors:
This research has been supported by King Abdullah University of Science and Technology.
Additional Links:
http://www.mdpi.com/2072-666X/8/1/14
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-02-12T13:38:50Z-
dc.date.available2017-02-12T13:38:50Z-
dc.date.issued2017-01-04en
dc.identifier.citationAlcheikh N, Ramini A, Hafiz M, Younis M (2017) Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads. Micromachines 8: 14. Available: http://dx.doi.org/10.3390/mi8010014.en
dc.identifier.issn2072-666Xen
dc.identifier.doi10.3390/mi8010014en
dc.identifier.urihttp://hdl.handle.net/10754/622876-
dc.description.abstractWe present a simulation and experimental investigation of bi-directional tunable in-plane clamped-guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them.en
dc.description.sponsorshipThis research has been supported by King Abdullah University of Science and Technology.en
dc.publisherMDPI AGen
dc.relation.urlhttp://www.mdpi.com/2072-666X/8/1/14en
dc.rightsThis is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).en
dc.rights.urihttps://creativecommons.org/licenses/by-nc-sa/4.0/en
dc.subjectBi-directional electrostatic actuatoren
dc.subjectClamped-guided arch beamsen
dc.subjectMicroresonatorsen
dc.titleTunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loadsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalMicromachinesen
dc.eprint.versionPublisher's Version/PDFen
kaust.authorAlcheikh, Nouhaen
kaust.authorRamini, Abdallahen
kaust.authorHafiz, Md Abdullah Alen
kaust.authorYounis, Mohammad I.en
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