Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters

Handle URI:
http://hdl.handle.net/10754/622841
Title:
Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
Authors:
Hajjaj, Amal Z.; Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Hajjaj AZ, Hafiz MA, Younis MI (2017) Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters. Scientific Reports 7: 41820. Available: http://dx.doi.org/10.1038/srep41820.
Publisher:
Springer Nature
Journal:
Scientific Reports
Issue Date:
30-Jan-2017
DOI:
10.1038/srep41820
Type:
Article
ISSN:
2045-2322
Sponsors:
We acknowledge financial support from King Abdullah University of Science and Technology.
Additional Links:
http://www.nature.com/articles/srep41820
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-02-07T08:28:37Z-
dc.date.available2017-02-07T08:28:37Z-
dc.date.issued2017-01-30en
dc.identifier.citationHajjaj AZ, Hafiz MA, Younis MI (2017) Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters. Scientific Reports 7: 41820. Available: http://dx.doi.org/10.1038/srep41820.en
dc.identifier.issn2045-2322en
dc.identifier.doi10.1038/srep41820en
dc.identifier.urihttp://hdl.handle.net/10754/622841-
dc.description.abstractWe experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.en
dc.description.sponsorshipWe acknowledge financial support from King Abdullah University of Science and Technology.en
dc.publisherSpringer Natureen
dc.relation.urlhttp://www.nature.com/articles/srep41820en
dc.rightsThis work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.titleMode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filtersen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalScientific Reportsen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, USAen
kaust.authorHajjaj, Amal Z.en
kaust.authorHafiz, Md Abdullah Alen
kaust.authorYounis, Mohammad I.en
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