Surface enhanced thermo lithography

Handle URI:
http://hdl.handle.net/10754/622694
Title:
Surface enhanced thermo lithography
Authors:
Coluccio, Maria Laura; Alabastri, Alessandro; Bonanni, Simon; Majewska, Roksana; Dattoli, Elisabetta; Barberio, Marianna; Candeloro, Patrizio; Perozziello, Gerardo; Mollace, Vincenzo; Di Fabrizio, Enzo M. ( 0000-0001-5886-4678 ) ; Gentile, Francesco
Abstract:
We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Coluccio ML, Alabastri A, Bonanni S, Majewska R, Dattoli E, et al. (2017) Surface enhanced thermo lithography. Microelectronic Engineering. Available: http://dx.doi.org/10.1016/j.mee.2017.01.004.
Publisher:
Elsevier BV
Journal:
Microelectronic Engineering
Issue Date:
13-Jan-2017
DOI:
10.1016/j.mee.2017.01.004
Type:
Article
ISSN:
0167-9317
Sponsors:
This work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665).
Additional Links:
http://www.sciencedirect.com/science/article/pii/S0167931717300047
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorColuccio, Maria Lauraen
dc.contributor.authorAlabastri, Alessandroen
dc.contributor.authorBonanni, Simonen
dc.contributor.authorMajewska, Roksanaen
dc.contributor.authorDattoli, Elisabettaen
dc.contributor.authorBarberio, Mariannaen
dc.contributor.authorCandeloro, Patrizioen
dc.contributor.authorPerozziello, Gerardoen
dc.contributor.authorMollace, Vincenzoen
dc.contributor.authorDi Fabrizio, Enzo M.en
dc.contributor.authorGentile, Francescoen
dc.date.accessioned2017-01-15T13:40:36Z-
dc.date.available2017-01-15T13:40:36Z-
dc.date.issued2017-01-13en
dc.identifier.citationColuccio ML, Alabastri A, Bonanni S, Majewska R, Dattoli E, et al. (2017) Surface enhanced thermo lithography. Microelectronic Engineering. Available: http://dx.doi.org/10.1016/j.mee.2017.01.004.en
dc.identifier.issn0167-9317en
dc.identifier.doi10.1016/j.mee.2017.01.004en
dc.identifier.urihttp://hdl.handle.net/10754/622694-
dc.description.abstractWe used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.en
dc.description.sponsorshipThis work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665).en
dc.publisherElsevier BVen
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S0167931717300047en
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 13 January 2017. DOI: 10.1016/j.mee.2017.01.004en
dc.subjectThermo-plasmonicsen
dc.subjectElectroless depositionen
dc.subjectSilver nanoparticlesen
dc.subjectSurface enhanced thermo lithographyen
dc.subjectPolyphthalaldehyde (PPA) polymeren
dc.titleSurface enhanced thermo lithographyen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalMicroelectronic Engineeringen
dc.eprint.versionPost-printen
dc.contributor.institutionDepartment of Experimental and Clinical Medicine, University of Magna Graecia, 88100 Catanzaro, Italyen
dc.contributor.institutionPhysics and Astronomy Department, Rice University, Houston, TX, USAen
dc.contributor.institutionSwisslitho AG, Technoparkstrasse 1, CH-8005 Zurich, Switzerlanden
dc.contributor.institutionIpat-lab, INRS-EMT, 1650 Boul Lionel Boulet, Varennes, QC, Canadaen
dc.contributor.institutionDepartment of Health Sciences, University of Magna Graecia, 88100 Catanzaro, Italyen
dc.contributor.institutionDepartment of Electrical Engineering and Information Technology, University Federico II, Naples, Italyen
kaust.authorDi Fabrizio, Enzo M.en
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