Piezoelectric transducer array microspeaker

Handle URI:
http://hdl.handle.net/10754/622587
Title:
Piezoelectric transducer array microspeaker
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Castro, David; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Foulds, Ian G.
Abstract:
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
KAUST Department:
King Abdullah University of Science and Technology (KAUST), Thuwal, Kingdom of Saudi Arabia
Citation:
Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Issue Date:
19-Dec-2016
DOI:
10.1109/NEMS.2016.7758227
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/document/7758227/
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorCastro, Daviden
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2017-01-02T09:55:31Z-
dc.date.available2017-01-02T09:55:31Z-
dc.date.issued2016-12-19en
dc.identifier.citationArevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.en
dc.identifier.doi10.1109/NEMS.2016.7758227en
dc.identifier.urihttp://hdl.handle.net/10754/622587-
dc.description.abstractIn this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7758227/en
dc.titlePiezoelectric transducer array microspeakeren
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and Technology (KAUST), Thuwal, Kingdom of Saudi Arabiaen
dc.identifier.journal2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)en
dc.contributor.institutionUniversity of British Columbia (UBC). Kelenowa, Canadaen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorConchouso Gonzalez, Daviden
kaust.authorCastro, Daviden
kaust.authorKosel, Jürgenen
kaust.authorFoulds, Ian G.en
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