Digital electrostatic acoustic transducer array

Handle URI:
http://hdl.handle.net/10754/622534
Title:
Digital electrostatic acoustic transducer array
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Castro, David; Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Foulds, Ian G.
Abstract:
In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Mechanical Engineering Program; Electrical Engineering Program
Citation:
Arevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) Digital electrostatic acoustic transducer array. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758238.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Issue Date:
19-Dec-2016
DOI:
10.1109/NEMS.2016.7758238
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/document/7758238/
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Electrical Engineering Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorCastro, Daviden
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2017-01-02T09:55:28Z-
dc.date.available2017-01-02T09:55:28Z-
dc.date.issued2016-12-19en
dc.identifier.citationArevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) Digital electrostatic acoustic transducer array. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758238.en
dc.identifier.doi10.1109/NEMS.2016.7758238en
dc.identifier.urihttp://hdl.handle.net/10754/622534-
dc.description.abstractIn this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7758238/en
dc.titleDigital electrostatic acoustic transducer arrayen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.contributor.departmentElectrical Engineering Programen
dc.identifier.journal2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)en
dc.contributor.institutionUniversity of British Columbia (UBC). Kelenowa, Canadaen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorCastro, Daviden
kaust.authorConchouso Gonzalez, Daviden
kaust.authorKosel, Jürgenen
kaust.authorFoulds, Ian G.en
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