Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

Handle URI:
http://hdl.handle.net/10754/622444
Title:
Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Castro, David; Diaz, Marlon; Foulds, Ian G.
Abstract:
The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Physical Sciences and Engineering (PSE) Division
Citation:
Arevalo A, Castro D, Diaz M, Conchouso D, Foulds IG (2015) Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications. Micro & Nano Letters 10: 545–549. Available: http://dx.doi.org/10.1049/mnl.2015.0198.
Publisher:
Institution of Engineering and Technology (IET)
Journal:
Micro & Nano Letters
Issue Date:
27-Oct-2015
DOI:
10.1049/mnl.2015.0198
Type:
Article
ISSN:
1750-0443
Sponsors:
This work was supported by the King Abdullah University of Science and Technology.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorCastro, Daviden
dc.contributor.authorDiaz, Marlonen
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2017-01-02T09:28:31Z-
dc.date.available2017-01-02T09:28:31Z-
dc.date.issued2015-10-27en
dc.identifier.citationArevalo A, Castro D, Diaz M, Conchouso D, Foulds IG (2015) Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications. Micro & Nano Letters 10: 545–549. Available: http://dx.doi.org/10.1049/mnl.2015.0198.en
dc.identifier.issn1750-0443en
dc.identifier.doi10.1049/mnl.2015.0198en
dc.identifier.urihttp://hdl.handle.net/10754/622444-
dc.description.abstractThe integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.en
dc.description.sponsorshipThis work was supported by the King Abdullah University of Science and Technology.en
dc.publisherInstitution of Engineering and Technology (IET)en
dc.titleOut-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applicationsen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalMicro & Nano Lettersen
dc.contributor.institutionUniversity of British Columbia (UBC), Kelowna, Canadaen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorConchouso Gonzalez, Daviden
kaust.authorCastro, Daviden
kaust.authorDiaz, Marlonen
kaust.authorFoulds, Ian G.en
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