Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation

Handle URI:
http://hdl.handle.net/10754/622426
Title:
Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation
Authors:
Bouchaala, Adam M.; Nayfeh, Ali H.; Jaber, Nizar; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present a method to determine accurately the position and mass of an entity attached to the surface of an electrostatically actuated clamped-clamped microbeam implemented as a mass sensor. In the theoretical investigation, the microbeam is modeled as a nonlinear Euler-Bernoulli beam and a perturbation technique is used to develop a closed-form expression for the frequency shift due to an added mass at a specific location on the microbeam surface. The experimental investigation was conducted on a microbeam made of Polyimide with a special lower electrode to excite both of the first and second modes of vibration. Using an ink-jet printer, we deposited droplets of polymers with a defined mass and position on the surface of the microbeam and we measured the shifts in its resonance frequencies. The theoretical predictions of the mass and position of the deposited droplets match well with the experimental measurements.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Bouchaala A, Nayfeh AH, Jaber N, Younis MI (2016) Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation. Journal of Micromechanics and Microengineering 26: 105009. Available: http://dx.doi.org/10.1088/0960-1317/26/10/105009.
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
31-Aug-2016
DOI:
10.1088/0960-1317/26/10/105009
Type:
Article
ISSN:
0960-1317; 1361-6439
Sponsors:
This research has been supported by KAUST.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorBouchaala, Adam M.en
dc.contributor.authorNayfeh, Ali H.en
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-01-02T09:28:30Z-
dc.date.available2017-01-02T09:28:30Z-
dc.date.issued2016-08-31en
dc.identifier.citationBouchaala A, Nayfeh AH, Jaber N, Younis MI (2016) Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation. Journal of Micromechanics and Microengineering 26: 105009. Available: http://dx.doi.org/10.1088/0960-1317/26/10/105009.en
dc.identifier.issn0960-1317en
dc.identifier.issn1361-6439en
dc.identifier.doi10.1088/0960-1317/26/10/105009en
dc.identifier.urihttp://hdl.handle.net/10754/622426-
dc.description.abstractWe present a method to determine accurately the position and mass of an entity attached to the surface of an electrostatically actuated clamped-clamped microbeam implemented as a mass sensor. In the theoretical investigation, the microbeam is modeled as a nonlinear Euler-Bernoulli beam and a perturbation technique is used to develop a closed-form expression for the frequency shift due to an added mass at a specific location on the microbeam surface. The experimental investigation was conducted on a microbeam made of Polyimide with a special lower electrode to excite both of the first and second modes of vibration. Using an ink-jet printer, we deposited droplets of polymers with a defined mass and position on the surface of the microbeam and we measured the shifts in its resonance frequencies. The theoretical predictions of the mass and position of the deposited droplets match well with the experimental measurements.en
dc.description.sponsorshipThis research has been supported by KAUST.en
dc.publisherIOP Publishingen
dc.subjectelectrostatic actuationen
dc.subjecthigher-order modesen
dc.subjectmass and position determinationen
dc.subjectmicrobeamsen
dc.titleMass and position determination in MEMS mass sensors: a theoretical and an experimental investigationen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
dc.contributor.institutionDepartment of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, Blacksburg, VA, 24061, United Statesen
dc.contributor.institutionDepartment of Mechanical Engineering, University of Jordan, Amman, Jordanen
kaust.authorBouchaala, Adam M.en
kaust.authorJaber, Nizaren
kaust.authorYounis, Mohammad I.en
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