Initially curved microplates under electrostatic actuation: theory and experiment

Handle URI:
http://hdl.handle.net/10754/622419
Title:
Initially curved microplates under electrostatic actuation: theory and experiment
Authors:
Saghir, Shahid ( 0000-0001-8045-0228 ) ; Bellaredj, Mohammed Lamine Faycal ( 0000-0001-6959-2911 ) ; Ramini, Abdallah; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
Microplates are the building blocks of many micro-electro-mechanical systems. It is common for them to experience initial curvature imperfection due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat ones and cannot be modeled using flat plate models. In this paper, we adopt a dynamic analog of the von Karman governing equations of imperfect plates. These equations are then used to develop a reduced order model based on the Galerkin procedure, to simulate the static and dynamic behavior of the microplate under electrostatic actuation. To validate the simulation results, an initially curved imperfect microplate made of silicon nitride is fabricated and tested. The static behaviour of the microplate is investigated when applying a DC voltage Vdc. Then, the dynamic behaviour of the microplate is examined under the application of a harmonic AC voltage, Vac, superimposed to Vdc. The simulation results show good agreement with the experimentally measured responses. © 2016 IOP Publishing Ltd.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Citation:
Saghir S, Bellaredj ML, Ramini A, Younis MI (2016) Initially curved microplates under electrostatic actuation: theory and experiment. Journal of Micromechanics and Microengineering 26: 095004. Available: http://dx.doi.org/10.1088/0960-1317/26/9/095004.
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
1-Jul-2016
DOI:
10.1088/0960-1317/26/9/095004
Type:
Article
ISSN:
0960-1317; 1361-6439
Additional Links:
http://iopscience.iop.org/article/10.1088/0960-1317/26/9/095004/meta;jsessionid=8BA3DFEB8A9930B84D773F2457EAB882.ip-10-40-1-114
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorSaghir, Shahiden
dc.contributor.authorBellaredj, Mohammed Lamine Faycalen
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2017-01-02T09:28:30Z-
dc.date.available2017-01-02T09:28:30Z-
dc.date.issued2016-07-01en
dc.identifier.citationSaghir S, Bellaredj ML, Ramini A, Younis MI (2016) Initially curved microplates under electrostatic actuation: theory and experiment. Journal of Micromechanics and Microengineering 26: 095004. Available: http://dx.doi.org/10.1088/0960-1317/26/9/095004.en
dc.identifier.issn0960-1317en
dc.identifier.issn1361-6439en
dc.identifier.doi10.1088/0960-1317/26/9/095004en
dc.identifier.urihttp://hdl.handle.net/10754/622419-
dc.description.abstractMicroplates are the building blocks of many micro-electro-mechanical systems. It is common for them to experience initial curvature imperfection due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat ones and cannot be modeled using flat plate models. In this paper, we adopt a dynamic analog of the von Karman governing equations of imperfect plates. These equations are then used to develop a reduced order model based on the Galerkin procedure, to simulate the static and dynamic behavior of the microplate under electrostatic actuation. To validate the simulation results, an initially curved imperfect microplate made of silicon nitride is fabricated and tested. The static behaviour of the microplate is investigated when applying a DC voltage Vdc. Then, the dynamic behaviour of the microplate is examined under the application of a harmonic AC voltage, Vac, superimposed to Vdc. The simulation results show good agreement with the experimentally measured responses. © 2016 IOP Publishing Ltd.en
dc.publisherIOP Publishingen
dc.relation.urlhttp://iopscience.iop.org/article/10.1088/0960-1317/26/9/095004/meta;jsessionid=8BA3DFEB8A9930B84D773F2457EAB882.ip-10-40-1-114en
dc.subjectelectrostatic actuationen
dc.subjectimperfect platesen
dc.subjectnonlinear oscillationen
dc.subjectreduced order modelen
dc.subjectvibration of platesen
dc.titleInitially curved microplates under electrostatic actuation: theory and experimenten
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
kaust.authorSaghir, Shahiden
kaust.authorBellaredj, Mohammed Lamine Faycalen
kaust.authorRamini, Abdallahen
kaust.authorYounis, Mohammad I.en
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