Efficient primary and parametric resonance excitation of bistable resonators

Handle URI:
http://hdl.handle.net/10754/622013
Title:
Efficient primary and parametric resonance excitation of bistable resonators
Authors:
Ramini, Abdallah; Alcheikh, Nouha; Ilyas, Saad ( 0000-0002-9389-9718 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We experimentally demonstrate an efficient approach to excite primary and parametric (up to the 4th) resonance of Microelectromechanical system MEMS arch resonators with large vibrational amplitudes. A single crystal silicon in-plane arch microbeam is fabricated such that it can be excited axially from one of its ends by a parallel-plate electrode. Its micro/nano scale vibrations are transduced using a high speed camera. Through the parallel-plate electrode, a time varying electrostatic force is applied, which is converted into a time varying axial force that modulates dynamically the stiffness of the arch resonator. Due to the initial curvature of the structure, not only parametric excitation is induced, but also primary resonance. Experimental investigation is conducted comparing the response of the arch near primary resonance using the axial excitation to that of a classical parallel-plate actuation where the arch itself forms an electrode. The results show that the axial excitation can be more efficient and requires less power for primary resonance excitation. Moreover, unlike the classical method where the structure is vulnerable to the dynamic pull-in instability, the axial excitation technique can provide large amplitude motion while protecting the structure from pull-in. In addition to primary resonance, parametrical resonances are demonstrated at twice, one-half, and two-thirds the primary resonance frequency. The ability to actuate primary and/or parametric resonances can serve various applications, such as for resonator based logic and memory devices. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Ramini A, Alcheikh N, Ilyas S, Younis MI (2016) Efficient primary and parametric resonance excitation of bistable resonators. AIP Advances 6: 095307. Available: http://dx.doi.org/10.1063/1.4962843.
Publisher:
AIP Publishing
Journal:
AIP Advances
Issue Date:
12-Sep-2016
DOI:
10.1063/1.4962843
Type:
Article
ISSN:
2158-3226
Additional Links:
http://aip.scitation.org/doi/full/10.1063/1.4962843
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorIlyas, Saaden
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-12-13T13:46:39Z-
dc.date.available2016-12-13T13:46:39Z-
dc.date.issued2016-09-12en
dc.identifier.citationRamini A, Alcheikh N, Ilyas S, Younis MI (2016) Efficient primary and parametric resonance excitation of bistable resonators. AIP Advances 6: 095307. Available: http://dx.doi.org/10.1063/1.4962843.en
dc.identifier.issn2158-3226en
dc.identifier.doi10.1063/1.4962843en
dc.identifier.urihttp://hdl.handle.net/10754/622013-
dc.description.abstractWe experimentally demonstrate an efficient approach to excite primary and parametric (up to the 4th) resonance of Microelectromechanical system MEMS arch resonators with large vibrational amplitudes. A single crystal silicon in-plane arch microbeam is fabricated such that it can be excited axially from one of its ends by a parallel-plate electrode. Its micro/nano scale vibrations are transduced using a high speed camera. Through the parallel-plate electrode, a time varying electrostatic force is applied, which is converted into a time varying axial force that modulates dynamically the stiffness of the arch resonator. Due to the initial curvature of the structure, not only parametric excitation is induced, but also primary resonance. Experimental investigation is conducted comparing the response of the arch near primary resonance using the axial excitation to that of a classical parallel-plate actuation where the arch itself forms an electrode. The results show that the axial excitation can be more efficient and requires less power for primary resonance excitation. Moreover, unlike the classical method where the structure is vulnerable to the dynamic pull-in instability, the axial excitation technique can provide large amplitude motion while protecting the structure from pull-in. In addition to primary resonance, parametrical resonances are demonstrated at twice, one-half, and two-thirds the primary resonance frequency. The ability to actuate primary and/or parametric resonances can serve various applications, such as for resonator based logic and memory devices. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) licenseen
dc.publisherAIP Publishingen
dc.relation.urlhttp://aip.scitation.org/doi/full/10.1063/1.4962843en
dc.rightsAll article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.titleEfficient primary and parametric resonance excitation of bistable resonatorsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalAIP Advancesen
dc.eprint.versionPublisher's Version/PDFen
kaust.authorRamini, Abdallahen
kaust.authorAlcheikh, Nouhaen
kaust.authorIlyas, Saaden
kaust.authorYounis, Mohammad I.en
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