In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Handle URI:
http://hdl.handle.net/10754/621870
Title:
In-Plane MEMS Shallow Arch Beam for Mechanical Memory
Authors:
Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Kosuru, Lakshmoji ( 0000-0003-3813-9262 ) ; Ramini, Abdallah; Chappanda, Karumbaiah N.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Physical Sciences and Engineering (PSE) Division
Citation:
Hafiz M, Kosuru L, Ramini A, Chappanda K, Younis M (2016) In-Plane MEMS Shallow Arch Beam for Mechanical Memory. Micromachines 7: 191. Available: http://dx.doi.org/10.3390/mi7100191.
Publisher:
MDPI AG
Journal:
Micromachines
Issue Date:
18-Oct-2016
DOI:
10.3390/mi7100191
Type:
Article
ISSN:
2072-666X
Sponsors:
The authors acknowledge Ulrich Buttner, Electromechanical Microsystem & Polymer Integration Research (EMPIRe) Lab at King Abdullah University of Science and Technology (KAUST) for helping with laser cutting the chips. This research has been funded by KAUST.
Additional Links:
http://www.mdpi.com/2072-666X/7/10/191/htm
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorKosuru, Lakshmojien
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorChappanda, Karumbaiah N.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-11-23T13:48:38Z-
dc.date.available2016-11-23T13:48:38Z-
dc.date.issued2016-10-18en
dc.identifier.citationHafiz M, Kosuru L, Ramini A, Chappanda K, Younis M (2016) In-Plane MEMS Shallow Arch Beam for Mechanical Memory. Micromachines 7: 191. Available: http://dx.doi.org/10.3390/mi7100191.en
dc.identifier.issn2072-666Xen
dc.identifier.doi10.3390/mi7100191en
dc.identifier.urihttp://hdl.handle.net/10754/621870-
dc.description.abstractWe demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.en
dc.description.sponsorshipThe authors acknowledge Ulrich Buttner, Electromechanical Microsystem & Polymer Integration Research (EMPIRe) Lab at King Abdullah University of Science and Technology (KAUST) for helping with laser cutting the chips. This research has been funded by KAUST.en
dc.publisherMDPI AGen
dc.relation.urlhttp://www.mdpi.com/2072-666X/7/10/191/htmen
dc.rightsThis article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.subjectin-plane MEMSen
dc.subjectshallow archen
dc.subjectbistabilityen
dc.subjectmechanical memoryen
dc.titleIn-Plane MEMS Shallow Arch Beam for Mechanical Memoryen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalMicromachinesen
dc.eprint.versionPublisher's Version/PDFen
kaust.authorHafiz, Md Abdullah Alen
kaust.authorKosuru, Lakshmojien
kaust.authorRamini, Abdallahen
kaust.authorChappanda, Karumbaiah N.en
kaust.authorYounis, Mohammad I.en
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