Influence of squeeze film damping on the higher-order modes of clamped–clamped microbeams

Handle URI:
http://hdl.handle.net/10754/621557
Title:
Influence of squeeze film damping on the higher-order modes of clamped–clamped microbeams
Authors:
Alcheikh, Nouha; Kosuru, Lakshmoji ( 0000-0003-3813-9262 ) ; Jaber, Nizar; Bellaredj, Mohammed Lamine Faycal ( 0000-0001-6959-2911 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
This paper presents an experimental study and a finite-element analysis of the effect of squeeze film damping on the resonance frequency and quality factor of the higher-order flexure vibrations modes of clamped-clamped microbeams. Viscoelastic and silicon nitride microbeams are fabricated and are electrostatically actuated by various electrode configurations to trigger the first, second, and third modes. The damping characteristic and the resonance frequency of these modes are examined for a wide range of gas pressure and electrostatic voltage loads. The results of the silicon nitride beams and viscoelastic beams are compared. It is found that the intrinsic material loss is the major dissipation mechanism at low pressure for the viscoelastic microbeams, significantly limiting their quality factor. It is also found that while the silicon nitride beams show higher quality factors at the intrinsic and molecular regimes of pressure, due to their low intrinsic loss, their quality factors near atmospheric pressure are lower than those of the viscoelastic microbeams. Further, the higher-order modes of all the beams show much higher quality factors at atmospheric pressure compared to the first mode, which could be promising for operating such resonators in air. Experimental results and finite element model simulations show good agreement for resonance frequency and quality factor for the three studied modes. © 2016 IOP Publishing Ltd.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Alcheikh N, Kosuru L, Jaber N, Bellaredj M, Younis MI (2016) Influence of squeeze film damping on the higher-order modes of clamped–clamped microbeams. Journal of Micromechanics and Microengineering 26: 065014. Available: http://dx.doi.org/10.1088/0960-1317/26/6/065014.
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
6-May-2016
DOI:
10.1088/0960-1317/26/6/065014
Type:
Article
ISSN:
0960-1317; 1361-6439
Sponsors:
This research has been supported by KAUST.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorKosuru, Lakshmojien
dc.contributor.authorJaber, Nizaren
dc.contributor.authorBellaredj, Mohammed Lamine Faycalen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-11-03T08:32:07Z-
dc.date.available2016-11-03T08:32:07Z-
dc.date.issued2016-05-06en
dc.identifier.citationAlcheikh N, Kosuru L, Jaber N, Bellaredj M, Younis MI (2016) Influence of squeeze film damping on the higher-order modes of clamped–clamped microbeams. Journal of Micromechanics and Microengineering 26: 065014. Available: http://dx.doi.org/10.1088/0960-1317/26/6/065014.en
dc.identifier.issn0960-1317en
dc.identifier.issn1361-6439en
dc.identifier.doi10.1088/0960-1317/26/6/065014en
dc.identifier.urihttp://hdl.handle.net/10754/621557-
dc.description.abstractThis paper presents an experimental study and a finite-element analysis of the effect of squeeze film damping on the resonance frequency and quality factor of the higher-order flexure vibrations modes of clamped-clamped microbeams. Viscoelastic and silicon nitride microbeams are fabricated and are electrostatically actuated by various electrode configurations to trigger the first, second, and third modes. The damping characteristic and the resonance frequency of these modes are examined for a wide range of gas pressure and electrostatic voltage loads. The results of the silicon nitride beams and viscoelastic beams are compared. It is found that the intrinsic material loss is the major dissipation mechanism at low pressure for the viscoelastic microbeams, significantly limiting their quality factor. It is also found that while the silicon nitride beams show higher quality factors at the intrinsic and molecular regimes of pressure, due to their low intrinsic loss, their quality factors near atmospheric pressure are lower than those of the viscoelastic microbeams. Further, the higher-order modes of all the beams show much higher quality factors at atmospheric pressure compared to the first mode, which could be promising for operating such resonators in air. Experimental results and finite element model simulations show good agreement for resonance frequency and quality factor for the three studied modes. © 2016 IOP Publishing Ltd.en
dc.description.sponsorshipThis research has been supported by KAUST.en
dc.publisherIOP Publishingen
dc.subjectclamped-clamped microresonatorsen
dc.subjecthigher-order modesen
dc.subjectquality factoren
dc.subjectsqueeze film dampingen
dc.titleInfluence of squeeze film damping on the higher-order modes of clamped–clamped microbeamsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
kaust.authorAlcheikh, Nouhaen
kaust.authorKosuru, Lakshmojien
kaust.authorJaber, Nizaren
kaust.authorBellaredj, Mohammed Lamine Faycalen
kaust.authorYounis, Mohammad I.en
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