Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation

Handle URI:
http://hdl.handle.net/10754/621399
Title:
Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation
Authors:
Jaber, Nizar; Ramini, Abdallah; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
© 2016 IOP Publishing Ltd. In this study, we demonstrate analytically and experimentally the excitations of the higher order modes of vibrations in electrostatically actuated clamped-clamped microbeam resonators. The concept is based on using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with nickel from the top and chrome and gold layers from the bottom. Experimentally, frequency sweeps with different electro-dynamical loading conditions are shown to demonstrate the excitation of the higher order modes of vibration. Using a half electrode, the second mode is excited with high amplitude of vibration compared with almost zero response using the full electrode. Also, using a two-third electrode configuration is shown to amplify the third mode resonance amplitude compared with the full electrode under the same electrical loading conditions. An analytical model is developed based on the Euler-Bernollui beam model and the Galerkin method to simulate the device response. Good agreement between the simulation results and the experimental data is reported.
KAUST Department:
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Citation:
Jaber N, Ramini A, Carreno AAA, Younis MI (2016) Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation. Journal of Micromechanics and Microengineering 26: 025008. Available: http://dx.doi.org/10.1088/0960-1317/26/2/025008.
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
6-Jan-2016
DOI:
10.1088/0960-1317/26/2/025008
Type:
Article
ISSN:
0960-1317; 1361-6439
Sponsors:
This research was supported by KAUST.
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorJaber, Nizaren
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-11-03T08:28:24Z-
dc.date.available2016-11-03T08:28:24Z-
dc.date.issued2016-01-06en
dc.identifier.citationJaber N, Ramini A, Carreno AAA, Younis MI (2016) Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation. Journal of Micromechanics and Microengineering 26: 025008. Available: http://dx.doi.org/10.1088/0960-1317/26/2/025008.en
dc.identifier.issn0960-1317en
dc.identifier.issn1361-6439en
dc.identifier.doi10.1088/0960-1317/26/2/025008en
dc.identifier.urihttp://hdl.handle.net/10754/621399-
dc.description.abstract© 2016 IOP Publishing Ltd. In this study, we demonstrate analytically and experimentally the excitations of the higher order modes of vibrations in electrostatically actuated clamped-clamped microbeam resonators. The concept is based on using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with nickel from the top and chrome and gold layers from the bottom. Experimentally, frequency sweeps with different electro-dynamical loading conditions are shown to demonstrate the excitation of the higher order modes of vibration. Using a half electrode, the second mode is excited with high amplitude of vibration compared with almost zero response using the full electrode. Also, using a two-third electrode configuration is shown to amplify the third mode resonance amplitude compared with the full electrode under the same electrical loading conditions. An analytical model is developed based on the Euler-Bernollui beam model and the Galerkin method to simulate the device response. Good agreement between the simulation results and the experimental data is reported.en
dc.description.sponsorshipThis research was supported by KAUST.en
dc.publisherIOP Publishingen
dc.subjecthigher order modesen
dc.subjectnonlinear dynamicsen
dc.subjectresonatorsen
dc.subjectvibrationen
dc.titleHigher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigationen
dc.typeArticleen
dc.contributor.departmentKing Abdullah University of Science and Technology, Thuwal, Saudi Arabiaen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
kaust.authorJaber, Nizaren
kaust.authorRamini, Abdallahen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorYounis, Mohammad I.en
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