Multifrequency Excitation of a Clamped-Clamped Microbeam

Handle URI:
http://hdl.handle.net/10754/621349
Title:
Multifrequency Excitation of a Clamped-Clamped Microbeam
Authors:
Jaber, Nizar R.; Ramini, Abdallah; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data. © Copyright 2015 by ASME.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Jaber NR, Ramini A, Younis M (2015) Multifrequency Excitation of a Clamped-Clamped Microbeam. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47150.
Publisher:
ASME International
Journal:
Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
Conference/Event name:
ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
Issue Date:
20-Jan-2016
DOI:
10.1115/DETC2015-47150
Type:
Conference Paper
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorJaber, Nizar R.en
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-11-03T06:58:15Z-
dc.date.available2016-11-03T06:58:15Z-
dc.date.issued2016-01-20en
dc.identifier.citationJaber NR, Ramini A, Younis M (2015) Multifrequency Excitation of a Clamped-Clamped Microbeam. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47150.en
dc.identifier.doi10.1115/DETC2015-47150en
dc.identifier.urihttp://hdl.handle.net/10754/621349-
dc.description.abstractWe present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data. © Copyright 2015 by ASME.en
dc.publisherASME Internationalen
dc.titleMultifrequency Excitation of a Clamped-Clamped Microbeamen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalVolume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystemsen
dc.conference.date2 August 2015 through 5 August 2015en
dc.conference.nameASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015en
kaust.authorJaber, Nizar R.en
kaust.authorRamini, Abdallahen
kaust.authorYounis, Mohammad I.en
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