MEMS digital parametric loudspeaker

Handle URI:
http://hdl.handle.net/10754/621323
Title:
MEMS digital parametric loudspeaker
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Castro, David; Conchouso, David; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Foulds, Ian G.
Abstract:
This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Citation:
Arevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Conference/Event name:
29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Issue Date:
23-Mar-2016
DOI:
10.1109/MEMSYS.2016.7421826
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/document/7421826
Appears in Collections:
Conference Papers; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorCastro, Daviden
dc.contributor.authorConchouso, Daviden
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2016-11-03T06:57:40Z-
dc.date.available2016-11-03T06:57:40Z-
dc.date.issued2016-03-23en
dc.identifier.citationArevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.en
dc.identifier.doi10.1109/MEMSYS.2016.7421826en
dc.identifier.urihttp://hdl.handle.net/10754/621323-
dc.description.abstractThis paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/document/7421826en
dc.titleMEMS digital parametric loudspeakeren
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journal2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)en
dc.conference.date24 January 2016 through 28 January 2016en
dc.conference.name29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016en
dc.contributor.institutionUniversity of British Columbia, School of Engineering, Okanagan Campus, Kelowna, Canadaen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorCastro, Daviden
kaust.authorConchouso, Daviden
kaust.authorKosel, Jürgenen
kaust.authorFoulds, Ian G.en
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