An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation

Handle URI:
http://hdl.handle.net/10754/621239
Title:
An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation
Authors:
Ramini, Abdallah; Hafiz, Abdullah; Bellaredj, Mohammed Lamine Faycal ( 0000-0001-6959-2911 ) ; Al Hennawi, Qais M. ( 0000-0003-3741-842X ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.
KAUST Department:
King Abdullah University of Science and, Technology KAUST, Thuwal, Saudi Arabia; King Abdullah University of Science and Technology KAUST, Thuwal, Saudi Arabia
Citation:
Ramini A, Hafiz A, Bellaredj MLF, Al Hennawi QM, Younis MI (2015) An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47070.
Publisher:
ASME International
Journal:
Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
Conference/Event name:
ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
Issue Date:
20-Jan-2016
DOI:
10.1115/DETC2015-47070
Type:
Conference Paper
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorHafiz, Abdullahen
dc.contributor.authorBellaredj, Mohammed Lamine Faycalen
dc.contributor.authorAl Hennawi, Qais M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-11-03T06:56:08Z-
dc.date.available2016-11-03T06:56:08Z-
dc.date.issued2016-01-20en
dc.identifier.citationRamini A, Hafiz A, Bellaredj MLF, Al Hennawi QM, Younis MI (2015) An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47070.en
dc.identifier.doi10.1115/DETC2015-47070en
dc.identifier.urihttp://hdl.handle.net/10754/621239-
dc.description.abstractWe present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.en
dc.publisherASME Internationalen
dc.subjectIn-plane MEMSen
dc.titleAn Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitationen
dc.typeConference Paperen
dc.contributor.departmentKing Abdullah University of Science and, Technology KAUST, Thuwal, Saudi Arabiaen
dc.contributor.departmentKing Abdullah University of Science and Technology KAUST, Thuwal, Saudi Arabiaen
dc.identifier.journalVolume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystemsen
dc.conference.date2 August 2015 through 5 August 2015en
dc.conference.nameASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015en
kaust.authorRamini, Abdallahen
kaust.authorHafiz, Abdullahen
kaust.authorBellaredj, Mohammed Lamine Faycalen
kaust.authorAl Hennawi, Qais M.en
kaust.authorYounis, Mohammad I.en
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