A smart microelectromechanical sensor and switch triggered by gas

Handle URI:
http://hdl.handle.net/10754/615923
Title:
A smart microelectromechanical sensor and switch triggered by gas
Authors:
Bouchaala, Adam M.; Jaber, Nizar; Shekhah, Osama ( 0000-0003-1861-9226 ) ; Chernikova, Valeriya; Eddaoudi, Mohamed ( 0000-0003-1916-9837 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
There is an increasing interest to realize smarter sensors and actuators that can deliver a multitude of sophisticated functionalities while being compact in size and of low cost. We report here combining both sensing and actuation on the same device based on a single microstructure. Specifically, we demonstrate a smart resonant gas (mass) sensor, which in addition to being capable of quantifying the amount of absorbed gas, can be autonomously triggered as an electrical switch upon exceeding a preset threshold of absorbed gas. Toward this, an electrostatically actuated polymer microbeam is fabricated and is then functionalized with a metal-organic framework, namely, HKUST-1. The microbeam is demonstrated to absorb vapors up to a certain threshold, after which is shown to collapse through the dynamic pull-in instability. Upon pull-in, the microstructure can be made to act as an electrical switch to achieve desirable actions, such as alarming.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
A smart microelectromechanical sensor and switch triggered by gas 2016, 109 (1):013502 Applied Physics Letters
Publisher:
AIP Publishing
Journal:
Applied Physics Letters
Issue Date:
5-Jul-2016
DOI:
10.1063/1.4955309
Type:
Article
ISSN:
0003-6951; 1077-3118
Additional Links:
http://scitation.aip.org/content/aip/journal/apl/109/1/10.1063/1.4955309
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorBouchaala, Adam M.en
dc.contributor.authorJaber, Nizaren
dc.contributor.authorShekhah, Osamaen
dc.contributor.authorChernikova, Valeriyaen
dc.contributor.authorEddaoudi, Mohameden
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-07-11T09:34:54Z-
dc.date.available2016-07-11T09:34:54Z-
dc.date.issued2016-07-05-
dc.identifier.citationA smart microelectromechanical sensor and switch triggered by gas 2016, 109 (1):013502 Applied Physics Lettersen
dc.identifier.issn0003-6951-
dc.identifier.issn1077-3118-
dc.identifier.doi10.1063/1.4955309-
dc.identifier.urihttp://hdl.handle.net/10754/615923-
dc.description.abstractThere is an increasing interest to realize smarter sensors and actuators that can deliver a multitude of sophisticated functionalities while being compact in size and of low cost. We report here combining both sensing and actuation on the same device based on a single microstructure. Specifically, we demonstrate a smart resonant gas (mass) sensor, which in addition to being capable of quantifying the amount of absorbed gas, can be autonomously triggered as an electrical switch upon exceeding a preset threshold of absorbed gas. Toward this, an electrostatically actuated polymer microbeam is fabricated and is then functionalized with a metal-organic framework, namely, HKUST-1. The microbeam is demonstrated to absorb vapors up to a certain threshold, after which is shown to collapse through the dynamic pull-in instability. Upon pull-in, the microstructure can be made to act as an electrical switch to achieve desirable actions, such as alarming.en
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.urlhttp://scitation.aip.org/content/aip/journal/apl/109/1/10.1063/1.4955309en
dc.rightsArchived with thanks to Applied Physics Lettersen
dc.titleA smart microelectromechanical sensor and switch triggered by gasen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalApplied Physics Lettersen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorBouchaala, Adam M.en
kaust.authorJaber, Nizaren
kaust.authorShekhah, Osamaen
kaust.authorChernikova, Valeriyaen
kaust.authorEddaoudi, Mohameden
kaust.authorYounis, Mohammad I.en
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