An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

Handle URI:
http://hdl.handle.net/10754/614801
Title:
An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams
Authors:
Ilyas, Saad ( 0000-0002-9389-9718 ) ; Chappanda, Karumbaiah N.; Al Hafiz, Md A. ( 0000-0002-1257-5093 ) ; Ramini, Abdallah; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams 2016 Sensors and Actuators A: Physical
Publisher:
Elsevier BV
Journal:
Sensors and Actuators A: Physical
Issue Date:
16-Jun-2016
DOI:
10.1016/j.sna.2016.06.021
Type:
Article
ISSN:
09244247
Sponsors:
This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
Additional Links:
http://linkinghub.elsevier.com/retrieve/pii/S0924424716303077
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorIlyas, Saaden
dc.contributor.authorChappanda, Karumbaiah N.en
dc.contributor.authorAl Hafiz, Md A.en
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-06-27T10:33:08Z-
dc.date.available2016-06-27T10:33:08Z-
dc.date.issued2016-06-16-
dc.identifier.citationAn Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams 2016 Sensors and Actuators A: Physicalen
dc.identifier.issn09244247-
dc.identifier.doi10.1016/j.sna.2016.06.021-
dc.identifier.urihttp://hdl.handle.net/10754/614801-
dc.description.abstractWe present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.en
dc.description.sponsorshipThis work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.en
dc.language.isoenen
dc.publisherElsevier BVen
dc.relation.urlhttp://linkinghub.elsevier.com/retrieve/pii/S0924424716303077en
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, 16 June 2016. DOI: 10.1016/j.sna.2016.06.021en
dc.subjectMicro cantileversen
dc.subjectStatic pull-inen
dc.subjectPull-in timeen
dc.subjectCoupled resonatorsen
dc.subjectElectrostatic actuationen
dc.subjectBandwidthen
dc.subjectDynamic pull-inen
dc.titleAn Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeamsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalSensors and Actuators A: Physicalen
dc.eprint.versionPost-printen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorIlyas, Saaden
kaust.authorChappanda, Karumbaiah N.en
kaust.authorAl Hafiz, Md A.en
kaust.authorRamini, Abdallahen
kaust.authorYounis, Mohammad I.en
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