Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection

Handle URI:
http://hdl.handle.net/10754/611783
Title:
Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
Authors:
Bouchaala, Adam M.; Jaber, Nizar; Yassine, Omar ( 0000-0002-0117-8017 ) ; Shekhah, Osama ( 0000-0003-1861-9226 ) ; Chernikova, Valeriya; Eddaoudi, Mohamed ( 0000-0003-1916-9837 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 Sensors
Publisher:
MDPI AG
Journal:
Sensors
Issue Date:
25-May-2016
DOI:
10.3390/s16060758
Type:
Article
ISSN:
1424-8220
Sponsors:
This research has been supported by KAUST.
Additional Links:
http://www.mdpi.com/1424-8220/16/6/758
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorBouchaala, Adam M.en
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYassine, Omaren
dc.contributor.authorShekhah, Osamaen
dc.contributor.authorChernikova, Valeriyaen
dc.contributor.authorEddaoudi, Mohameden
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-06-06T07:38:16Z-
dc.date.available2016-06-06T07:38:16Z-
dc.date.issued2016-05-25-
dc.identifier.citationNonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 Sensorsen
dc.identifier.issn1424-8220-
dc.identifier.doi10.3390/s16060758-
dc.identifier.urihttp://hdl.handle.net/10754/611783-
dc.description.abstractThe objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.en
dc.description.sponsorshipThis research has been supported by KAUST.en
dc.language.isoenen
dc.publisherMDPI AGen
dc.relation.urlhttp://www.mdpi.com/1424-8220/16/6/758en
dc.rightsThis is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. http://creativecommons.org/licenses/by/4.0/en
dc.subjectmicrobeamen
dc.subjectgas sensoren
dc.subjectactive switchen
dc.subjectmicrocontrolleren
dc.subjectnonlinear dynamicsen
dc.subjectmetal-organic frameworken
dc.titleNonlinear-Based MEMS Sensors and Active Switches for Gas Detectionen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalSensorsen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorBouchaala, Adam M.en
kaust.authorJaber, Nizaren
kaust.authorYassine, Omaren
kaust.authorShekhah, Osamaen
kaust.authorChernikova, Valeriyaen
kaust.authorEddaoudi, Mohameden
kaust.authorYounis, Mohammad I.en
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