Fabrication and characterization of magnetic composite membrane pressure sensor

Handle URI:
http://hdl.handle.net/10754/611377
Title:
Fabrication and characterization of magnetic composite membrane pressure sensor
Authors:
Khan, Mohammed Asadullah; Alfadhel, Ahmed ( 0000-0003-3244-0644 ) ; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Bakolka, M.
Abstract:
This paper describes a magnetic field powered pressure sensor, which comprises a coil array and a magnetic composite membrane. The composite membrane is made by embedding a ribbon of the amorphous soft magnetic alloy Vitrovac®, in a 17 mm x 25 mm x 1.5 mm Polydimethylsiloxane (PDMS) layer. PDMS is chosen for its low Young's modulus and the amorphous alloy for its high permeability. The membrane is suspended 1.5 mm above a 17x19 array of microfabricated planar coils. The coils are fabricated by patterning a 620 nm thick gold layer. Each coil occupies an area of 36000 μm2 and consists of 14 turns. The sensor is tested by subjecting it to pressure and simultaneously exciting it by a 24 A/m, 100 kHz magnetic field. A pressure change from 0 kPa to 5.1 kPa, results in a 5400 ppm change in the voltage output.
KAUST Department:
Sensing, Magnetism and Microsystems Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2016 IEEE Sensors Applications Symposium (SAS)
Conference/Event name:
2016 IEEE Sensors Applications Symposium (SAS)
Issue Date:
20-Apr-2016
DOI:
10.1109/SAS.2016.7479871
Type:
Conference Paper
Sponsors:
The authors thank Mohammed Y. Alnassar and Ahad Ali for assisting with the coil array fabrication. Mr. Ulrich Buttner helped with the test setup and characterization of the pressure sensor. Research reported in this publication was supported by the King Abdullah University of Science and Technology (KAUST)
Additional Links:
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7479871
Appears in Collections:
Conference Papers; Sensing, Magnetism and Microsystems Lab

Full metadata record

DC FieldValue Language
dc.contributor.authorKhan, Mohammed Asadullahen
dc.contributor.authorAlfadhel, Ahmeden
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorBakolka, M.en
dc.date.accessioned2016-06-01T12:24:02Z-
dc.date.available2016-06-01T12:24:02Z-
dc.date.issued2016-04-20-
dc.identifier.doi10.1109/SAS.2016.7479871-
dc.identifier.urihttp://hdl.handle.net/10754/611377-
dc.description.abstractThis paper describes a magnetic field powered pressure sensor, which comprises a coil array and a magnetic composite membrane. The composite membrane is made by embedding a ribbon of the amorphous soft magnetic alloy Vitrovac®, in a 17 mm x 25 mm x 1.5 mm Polydimethylsiloxane (PDMS) layer. PDMS is chosen for its low Young's modulus and the amorphous alloy for its high permeability. The membrane is suspended 1.5 mm above a 17x19 array of microfabricated planar coils. The coils are fabricated by patterning a 620 nm thick gold layer. Each coil occupies an area of 36000 μm2 and consists of 14 turns. The sensor is tested by subjecting it to pressure and simultaneously exciting it by a 24 A/m, 100 kHz magnetic field. A pressure change from 0 kPa to 5.1 kPa, results in a 5400 ppm change in the voltage output.en
dc.description.sponsorshipThe authors thank Mohammed Y. Alnassar and Ahad Ali for assisting with the coil array fabrication. Mr. Ulrich Buttner helped with the test setup and characterization of the pressure sensor. Research reported in this publication was supported by the King Abdullah University of Science and Technology (KAUST)en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7479871en
dc.rights(c) 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.en
dc.subjectMagnetic Amorphous Alloyen
dc.subjectMagnetic Compositeen
dc.subjectPressure Sensoren
dc.subjectWireless Near Field Sensoren
dc.titleFabrication and characterization of magnetic composite membrane pressure sensoren
dc.typeConference Paperen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.identifier.journal2016 IEEE Sensors Applications Symposium (SAS)en
dc.conference.date20-22 April 2016en
dc.conference.name2016 IEEE Sensors Applications Symposium (SAS)en
dc.conference.locationCatania, Italyen
dc.eprint.versionPost-printen
dc.contributor.institutionElectrical and Computer Engineering Department Effat University Jeddah, Saudi Arabiaen
kaust.authorA. Khan, M.en
kaust.authorAlfadhel, Ahmeden
kaust.authorKosel, Jürgenen
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