Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

Handle URI:
http://hdl.handle.net/10754/610699
Title:
Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch
Authors:
Ramini, Abdallah; Al Hennawi, Qais M. ( 0000-0003-3741-842X ) ; Younis, Mohammad I. ( 0000-0002-1966-6713 )
Abstract:
We present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane MEMS arch when excited by a DC electrostatic load superimposed to an AC harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data.
KAUST Department:
Physical Sciences and Engineering Division
Citation:
Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch 2016:1 Journal of Microelectromechanical Systems
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
Journal of Microelectromechanical Systems
Issue Date:
2-May-2016
DOI:
10.1109/JMEMS.2016.2554659
Type:
Article
ISSN:
1057-7157; 1941-0158
Additional Links:
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7463473
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorAl Hennawi, Qais M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-05-25T12:22:04Z-
dc.date.available2016-05-25T12:22:04Z-
dc.date.issued2016-05-02-
dc.identifier.citationTheoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch 2016:1 Journal of Microelectromechanical Systemsen
dc.identifier.issn1057-7157-
dc.identifier.issn1941-0158-
dc.identifier.doi10.1109/JMEMS.2016.2554659-
dc.identifier.urihttp://hdl.handle.net/10754/610699-
dc.description.abstractWe present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane MEMS arch when excited by a DC electrostatic load superimposed to an AC harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data.en
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7463473en
dc.rightsArchived with thanks to Journal of Microelectromechanical Systemsen
dc.subjectMEMS Archen
dc.subjectNonlinear Dynamicsen
dc.subjectSnap-through instabilityen
dc.subjectparameter extractionen
dc.subjectResonatoren
dc.titleTheoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Archen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering Divisionen
dc.identifier.journalJournal of Microelectromechanical Systemsen
dc.eprint.versionPost-printen
dc.contributor.institutionMechanical Engineering Department Binghamton State University of New Yorken
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorRamini, Abdallahen
kaust.authorAl Hennawi, Qais M.en
kaust.authorYounis, Mohammad I.en
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