Highly Tunable Electrothermally and Electrostatically Actuated Resonators

Handle URI:
http://hdl.handle.net/10754/606874
Title:
Highly Tunable Electrothermally and Electrostatically Actuated Resonators
Authors:
Hajjaj, Amal Z.; Alcheikh, Nouha; Ramini, Abdallah; Hafiz, Md Abdullah Al ( 0000-0002-1257-5093 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
This paper demonstrates experimentally, theoretically, and numerically for the first time, a wide-range tunability of an in-plane clamped-clamped microbeam, bridge, and resonator actuated electrothermally and electrostatically. Using both actuation methods, we demonstrate that a single resonator can be operated at a wide range of frequencies. The microbeam is actuated electrothermally by passing a dc current through it, and electrostatically by applying a dc polarization voltage between the microbeam and the stationary electrode. We show that when increasing the electrothermal voltage, the compressive stress inside the microbeam increases, which leads eventually to its buckling. Before buckling, the fundamental frequency decreases until it drops to very low values, almost to zero. After buckling, the fundamental frequency increases, which is shown to be as high as twice the original resonance frequency. Adding a dc bias changes the qualitative nature of the tunability both before and after buckling, which adds another independent way of tuning. This reduces the dip before buckling, and can eliminate it if desired, and further increases the fundamental frequency after buckling. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared with the experimental data and simulation results of a multi-physics finite-element model. A good agreement is found among all the results. [2015-0341]
KAUST Department:
Mechanical Engineering Program
Citation:
Highly Tunable Electrothermally and Electrostatically Actuated Resonators 2016:1 Journal of Microelectromechanical Systems
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
Journal of Microelectromechanical Systems
Issue Date:
30-Mar-2016
DOI:
10.1109/JMEMS.2016.2542338
Type:
Article
ISSN:
1057-7157; 1941-0158
Additional Links:
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7444138
Appears in Collections:
Articles; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorAlcheikh, Nouhaen
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorHafiz, Md Abdullah Alen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-04-24T12:59:51Zen
dc.date.available2016-04-24T12:59:51Zen
dc.date.issued2016-03-30en
dc.identifier.citationHighly Tunable Electrothermally and Electrostatically Actuated Resonators 2016:1 Journal of Microelectromechanical Systemsen
dc.identifier.issn1057-7157en
dc.identifier.issn1941-0158en
dc.identifier.doi10.1109/JMEMS.2016.2542338en
dc.identifier.urihttp://hdl.handle.net/10754/606874en
dc.description.abstractThis paper demonstrates experimentally, theoretically, and numerically for the first time, a wide-range tunability of an in-plane clamped-clamped microbeam, bridge, and resonator actuated electrothermally and electrostatically. Using both actuation methods, we demonstrate that a single resonator can be operated at a wide range of frequencies. The microbeam is actuated electrothermally by passing a dc current through it, and electrostatically by applying a dc polarization voltage between the microbeam and the stationary electrode. We show that when increasing the electrothermal voltage, the compressive stress inside the microbeam increases, which leads eventually to its buckling. Before buckling, the fundamental frequency decreases until it drops to very low values, almost to zero. After buckling, the fundamental frequency increases, which is shown to be as high as twice the original resonance frequency. Adding a dc bias changes the qualitative nature of the tunability both before and after buckling, which adds another independent way of tuning. This reduces the dip before buckling, and can eliminate it if desired, and further increases the fundamental frequency after buckling. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared with the experimental data and simulation results of a multi-physics finite-element model. A good agreement is found among all the results. [2015-0341]en
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7444138en
dc.rights(c) 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.en
dc.subjectTunabilityen
dc.subjectelectrostatic actuationen
dc.subjectelectrothermal actuationen
dc.subjectresonatoren
dc.titleHighly Tunable Electrothermally and Electrostatically Actuated Resonatorsen
dc.typeArticleen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalJournal of Microelectromechanical Systemsen
dc.eprint.versionPost-printen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorHajjaj, Amal Z.en
kaust.authorAlcheikh, Nouhaen
kaust.authorRamini, Abdallahen
kaust.authorHafiz, Md Abdullah Alen
kaust.authorYounis, Mohammad I.en
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